Fabrication of Micro-Ignition Sequence Based on Electronics Safety and Arming Unit

Y Shen,J B Xu,Ch G Wang,T L Yang,Y T Wang,Z H Zhang,F W Li,Y H Ye,R Q Shen
DOI: https://doi.org/10.1088/1742-6596/1507/10/102004
2020-01-01
Journal of Physics Conference Series
Abstract:Abstract This paper describes an ignition circuit consisted of one micro igniter and one electronic security microswitch that could realize the intelligent function of micro-ignition sequence. The micro-ignition sequence, integrated with ignition circuit, chamber, nanothermite and B/KNO3, was fabricated on the same silicon chip by mechanical engraving and classic micro mechanical systems (MEMS) technology including magnetron sputtering and plasma etching steps. In addition, the size of micro-ignition sequence was less than 0.15 cm3. The electronic security microswitch based on energetic film Al/MoO3 can implement the function of circuit switch conversion under 1.5 A during 3 ms. The paper presents the design, fabrication and test of the micro-ignition sequence integrating of electronics safety and arming unit.
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