Optimization analysis of"L-2L"transmission line de-embedding method

Minghui YUN,Xiaolei WANG,Zhen QIN,Wenbin CHEN,Miao CAI,Daoguo YANG
DOI: https://doi.org/10.14106/j.cnki.1001-2028.2016.07.017
2016-01-01
Abstract:A improved "L-2L" de-embedding technology based on silicon-based microwave coplanar waveguide transmission line was presented to remove the influence of probe pad’s parasitic effect on the S-parameter of the device accurately. In order to determine the standard of the improved de-embedding method, the ideal transmission line structures without pads were simulated by using ADS software. S-parameter of the test sample was extracted using GSG(Ground-Signal-Ground) microwave probe. The ABCD matrix of the left pad and the right pad in single π type parasitic parameters equivalent circuit model considering different position of shunt admittance(Y) (m=0, 0.5, 1) was derived. The intrinsic characteristic S-parameter of the device on chips was obtained after de-embedding, and compared with electromagnetic simulation. The results show the S-parameters curve of m=1 is more closed to that of electromagnetic simulation compared with two others (m=0, 0.5) (ΔS11=18.431,ΔS21=4.405, the average deviation ofΔS=11.418). As for different devices on chips the m value should be taken into consideration seriously.
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