Parameter Characterization Of Silicon-Based Patterned Shield And Patterned Ground Shield Coplanar Waveguides

Xin Wang,Wenyan Yin,Junfa Mao
DOI: https://doi.org/10.1109/GSMM.2008.4534581
2008-01-01
Abstract:An accurate procedure is proposed to characterize distributed parameters of silicon-based patterned shield and patterned ground shield coplanar waveguides (PS- and PGS-CPWs), where skin and proximity effects are treated appropriately. These interconnects can include symmetrical, asymmetrical, non-uniform, and even differential transmission lines. Numerical investigations are carried out to show the influence of various geometrical and physical parameters on the frequency-dependent distributed parameters, which is important in the design of silicon-based microwave and millimeter wave integrated circuits.
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