Design and Optimization of Micro-switch Actuated by PZT Piezoelectric Cantilever Based on Si

LOU Li-fei,YANG Yin-tang,LI Yue-jin,ZHANG Jun-qin
DOI: https://doi.org/10.3969/j.issn.1004-2474.2005.04.033
2005-01-01
Abstract:The mechanical performance of a novel micro-switch actuated by PZT piezoelectric multiple-layer cantilever is studied with piezoelectric multiple-layer cantilever analysis model, and a new fabrication process of the micro-switch actuated by PZT piezoelectric multiple-layer cantilever based on Si is presented. By using software of finite element ANSYS7.0, the analyses on modal shapes of micro-cantilever structure are carried out. The relationship between structure parameters and the movement performance and some factors that may have an effect on the performance of this micro-switch are discussed. Furthermore the displacement of micro-switch applied direct-current working voltage of 0.3 volts is simulated. The results demonstrate that the micro-switch optimized can be applied to system on chip.
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