Abstract:Microelectroforming is not only a key step of LIGA (Lithographie, Galvanoformung, and Abformung) and LIGA-like techniques, but also a widely used method for fabricating freestanding metallic microcomponents. Currently, the commonly used molds, consisting of photoresist microstructures which are prepared by lithographic techniques and conductive substrates, limit the development of microelectroforming to a certain degree due to their high cost and complicated processing steps. In this paper, a novel low-cost and net-shaped microelectroforming method using silver (Ag)-coated poly(dimethylsiloxane) (PDMS) molds is demonstrated to fabricate freestanding metallic microcomponents. Pristine PDMS molds are first replicated from a microstructured master using soft lithography. Then polydopamine is adhered to the surfaces of the pristine PDMS molds and followed by electroless deposition of Ag nanoparticle coatings. Subsequently, metal atoms are electrodeposited on the Ag-coated PDMS molds to form metallic microcomponents. After microelectroforming, the Ag coatings are peeled off from the molds and adhered to the surfaces of the metallic microcomponents during the demolding process. However, the molds can be repaired repeatedly using electroless deposition of Ag coatings on the polydopamine films, and the Ag coatings adhered to the surfaces of metallic microcomponents can be completely removed by immersion in ammonia water. Therefore, the Ag-coated PDMS molds can be reused several times. The application of this method for fabricating freestanding metallic microcomponents is demonstrated by producing nickel microcomponents. The results show that freestanding nickel microcomponents with precise dimensions and low surface roughnesses can be reliably achieved. We believe that this method has great potential for fabricating metallic microcomponents, microparts, and micropatterns.

The Development of Microelectroforming Process of LIGA/Quasi-LIGA Technology

An Electrochemical Study of Micro-electroforming Ni for LIGA Technique

Electrochemical Studies Of Electrodeposition Of Nickel For Liga Microstructures

Microelectroforming of freestanding metallic microcomponents using silver-coated poly(dimethylsiloxane) molds

Progress in Microforming

Application of LIGA process in fabrication of medical devices and systems

Fabrication of LIGA Mold Insert Using Ni-PTFE Composite Micro-Electroforming

The State of the Art in Plastic Micro?forming

Study On Electrocrystallization Of Pulse Micro-Electroforming In Uv-Liga

Study on electrode process of UV-LIGA micro-electroforming by AC impedance method

Enhancement of micro hole wetting and hydrogen bubble release in the process of Ni micro electroforming under megasonic field

Metal Microstructure Microfabrication Technique

Micro-electroforming of Ni in Surface Micromachining

Dem Microfabrication Technique And Its Applications In Bioscience And Microfluidic Systems

3d Microfabrication Technology

The study of micro-electroform in LIGA

Study on Fabrication of Micro-Flowmeter by LIGA Technique

Microforming technology and its mechanical characteristics

Realization and new progress of microforming process

Quasi-LIGA process using multilayer photoresist technology

On the Design and Fabrication of Metal Molds in Liga