Research on P-Channel VDMOS Radiation Hardened Technology

Jian FENG,Jian WU,Xue WU,Kaizhou TAN,Bin WANG,Yonghui YANG
DOI: https://doi.org/10.13911/j.cnki.1004-3365.2017.04.030
2017-01-01
Abstract:The radiation hardened VDMOS plays an essential role in DC-DC converters that work in space environments.A radiation hardened-150 V P-channel VDMOS for reducing the effects of TID and SEE was developed from the view of radiation damage mechanism.For improving its performances when working in radiation environment,the partial thick field oxide was formed on the neck zone of VDMOS,and the N-body zone was doped by ion implantation with high dose.Also,the growth quality of gate oxide was optimized.The device was simulated and verified.The results showed that the TID was 3 kGy at the condition of worst drain biasing,and the LET threshold was 99.1 MeV · cm2/mg for SEGR and SEB.So it could be widely used in radiation hardened DC-DC converters for space electronic systems.
What problem does this paper attempt to address?