Parametric Yield Optimization Based on RSM and Uniform Experiment Design

Jing Ming-e,ZHOU Dian,MA Xiao-hua,Ma Pei-jun,HAO Yue
DOI: https://doi.org/10.3969/j.issn.1007-0249.2005.03.020
2005-01-01
Abstract:This paper presents an optimization approach of IC parametric yield based on RSM(response surface method) and uniform experiment design. Every designable circuit parameter and statistical variation are swept one by one with circuit simulator in order to determine the ranges of these parameters variation in which the circuit has based performances. In this range, a uniform design, which is based on Number Theory, is used to design circuit’s simulate to get a precise RSM. The RSM is verified by Cross Validation method. The optimal parameter will be gotten by the analysis of the RSM. The underlying methodology can also be used into process and device stages.
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