Abstract:Microelectromechanical system resonant sensors are widely used in high precision applications. Frequency measurement plays an important role in such frequency readout sensors. This paper proposed an improved modified frequency measurement method based on the multi-phase clock (MPC), which can effectively improve the measurement accuracy but does not reduce the output rate. Innovative claims include (1) building a model of measurement error for MPC in which the probability of triggering error under different conditions is calculated, (2) improving the accuracy of the MPC measurement by phase reverse, and (3) proposing an algorithm to eliminate jitters of the measured signal. We compared the measurement results of this optimized MPC realized by the field programmable gate array (FPGA) device with those of the conventional MPC, spectral measurement, and equal precision measurement implemented with the National Instruments acquisition equipment PXI-4461 and USB-6366, respectively. The results show that the bias instability of the adopted method is ∼10 µHz obtained by Allan variance analysis, which is better than that of the other three methods. It can meet the accuracy requirements for the resonant frequency measurement of state-of-the-art resonant accelerometers. In addition, an algorithm running in FPGA is proposed to eliminate jitters caused by the noise of the measured signal for enhancing the robust of optimized MPC. The results demonstrate that the optimized MPC has features of high accuracy and anti-interference capability and can be easily transferred to the application specific integrated circuit in the future due to its full digital circuit version.

Testing method of silicon micro resonant pressure sensor based on multi-frequency scanning

A New Frequency Characteristics Test System for Silicon Micromachined Resonant Sensor

Frequency Characteristics Testing Of Micromachined Resonant Pressure Sensor

MEMS Resonant Pressure Sensor Chip Testing Based on the Steady-State Sweep

Integrated Testing Analyzer for the Resonant Silicon Microstructure Sensor

Design on electrostatically excited silicon micromachined resonant pressure sensor

Model and Open-Loop Characteristics Test of the Silicon Resonant Pressure Microsensor

High-precision Frequency Measurement for Microresonant Sensors Based on Improved Modified Multi-Phase Clock Method.

Investigation on nonlinear vibration characteristics of resonant silicon microstructure pressure sensor

Research of a Silicon Resonance Pressure Sensor Technology

Test And Evaluation Of A Silicon Resonant Accelerometer Implemented In Soi Technology

Data Processing and Testing of the Open-Loop Characteristics for the Silicon Resonant Microsensor

A micro resonant pressure sensor with adjustable quality factor

A Silicon Micromachined Resonant Pressure Sensor

Novel Method Used to Measure Sensitivity of Piezoelectric Micropressure Sensor

Closed loop control of silicon micromachined resonant pressure sensors

A HIGH-QUALITY RESONANT PRESSURE MICRO SENSOR WITH THROUGH-SILICON-VIA ELECTRICAL INTERCONNECTIONS

Feasibility Study of a Pressure Sensor Based on Double-Ended Tuning Fork Quartz Resonator.

Silicon Resonant Micro Pressure Sensor and Micro Resonant Accelerometer

The Research of One-port Electrostatic Excitation & Capacitive Detection Method in the Silicon Resonant Micro-sensor

Research of the Atomic Force Microscope Scanning Head Based on the qPlus Technology