Design of the Air Chamber Placed in Vacuum

Fu-ru ZHAN,Hong-yong YUAN,Qing-an WANG,Zeng-liang YU
DOI: https://doi.org/10.3969/j.issn.1002-0322.2001.01.003
2001-01-01
Abstract:An air-chamber placed in vacuum for ion implanting was designed aiming at the fact that the ion implantation experiments are all performed under the vacuum state. Monte Carlo method was used to simulate the penetrated ion energy and path to conform the feasibility. The results showed the design is successful.
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