Abstract:The linear translation stages play an important role in computer numerical control machine tools, coordinate measuring machines and semiconductor lithograph equipment. Six geometric motion errors are associated with a precision linear stage. High precision simultaneous measurement of multiple degrees of freedom is essential for the multiple-dimension motion calibration of the ultra-precision linear translation stage. In this paper, a laser heterodyne interferometer for simultaneous measurement of displacement and roll angle based on the acousto-optic modulator is proposed. In this optical configuration, a stabilize single-frequency laser (f(0)) and two acousto-optic modulators are used to generate the laser source. The frequency shifts of the two AOMs are f(1) and f(2), respectively. The positive first order diffraction beams of two AOMs, f(0)+f(1) and f(0)+f(2), are merged into one orthogonally and linearly polarized beam with a frequency offset of (f(1)-f(2)) as the laser source for the roll measurement-unit. A half wave plate (HWP) is utilized as the roll sensing plate to magnify the tiny roll angle into an observable phase shift based on the change of polarization state. The resolution of the roll measurement system is determined by the amplification factor which can be enhanced by a multi-reflection cavity made of a specifically arranged assembly square pyramidal mirror and a folding mirror. The zeroth beam f(0) and the positive first order beam f(0)+f(1) provided by two AOMs forms two space separated beams for the displacement measurement, which can eliminate the periodic nonlinearity error. The optical system of the simultaneous measurement of displacement and roll angle were setup. The experimental results showed good repeatability and good consistency.

A Research of Roll and Motion Straightness Synchronous Measurement Based on an Interferometer

A Novel Method to Simultaneously Measure the Straightness

A High-Precision Five-Degree-Of-Freedom Measurement System Based on Laser Collimator and Interferometry Techniques

A Straightness Measurement System Using a Single-Mode Fiber-Coupled Laser Module

A Novel Method To Enhance The Sensitivity For Two-Degrees-Of-Freedom Straightness Measurement

Study of the Method for Measuring Four-Degree-of-Freedom Geometric Errors of a Linear Stage

Novel Enhancing Resolution Method for Measurement Straightness Error

Four Degree-Of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift

Simultaneous Measuring Method Of Linear Guide Geometric Errors In Four-Degrees Of Freedom

Roll angle measurement based on common path compensation principle

Development of Equipment for Simultaneously Measuring Two-dimensional Rotation Angles of the Linear Guide Track

Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide.

Laser Heterodyne Interferometer for Simultaneous Measurement of Displacement and Roll Angle Based on the Acousto-Optic Modulators

Modified Homodyne Laser Interferometer Based on Phase Modulation for Simultaneously Measuring Displacement and Angle.

Measurement of Straightness Without Abbe Error Using an Enhanced Differential Plane Mirror Interferometer

Resolution-enhanced Heterodyne Laser Interferometer with Differential Configuration for Roll Angle Measurement.

A Heterodyne Straightness and Displacement Measuring Interferometer with Laser Beam Drift Compensation for Long-Travel Linear Stage Metrology.

High precision roll angle interferometer

Simultaneous measurement of the straightness error and its position using a modified Wollaston-prism-sensing homodyne interferometer

Heterodyne Interferometer with Two Parallel-Polarized Input Beams for High-Resolution Roll Angle Measurement.

Straightness Measurement Based On Phase Sensitive Detection Technique