Deep-UV hexagonal boron nitride (hBN)/BAIN distributed Bragg reflectors fabricated by RF-sputtering

Qiang Li,Qifan Zhang,Yunhe Bai,Haoran Zhang,Peng Hu,Yufeng Li,Feng Yun
DOI: https://doi.org/10.1364/OME.414330
2021-01-01
Optical Materials Express
Abstract:The hexagonal boron nitride (hBN) and BAIN films were prepared by RF-sputtering, which were used as the low and high refractive index layers. A series of hBN/BAIN distributed Bragg reflectors (DBRs) were prepared on sapphire substrate. The reflectivity of 9-pair hBN/BAIN (39 nm/33 nm) DBR reached 90% at 300 nm with a bandwidth of 45 nm, and which of 6-pair hBN/BAlN (35 nm/29 nm) reached 52% at 280 nm. The hBN/BAlN DBRs can be used to achieve higher reflectivity in shorter UV bands with the improvement of BAIN material quality through the growth condition optimization. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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