Abstract:Hexagonal boron nitride (hBN)-long-known as a thermally stable ceramic-is now available as atomically smooth, single-crystalline flakes, revolutionizing its use in optoelectronics. For nanophotonics, these flakes offer strong nonlinearities, hyperbolic dispersion, and single-photon emission, providing unique properties for optical and quantum-optical applications. For nanoelectronics, their pristine surfaces, chemical stability, and wide bandgap have made them the key substrate, encapsulant, and gate dielectric for two-dimensional electronic devices. However, while exploring these advantages, researchers have been restricted to flat flakes or those patterned with basic slits and holes, severely limiting advanced architectures. If freely varying flake profiles were possible, the hBN structure would present a powerful design parameter to further manipulate the flow of photons, electrons, and excitons in next-generation devices. Here, we demonstrate freeform nanostructuring of hBN by combining thermal scanning-probe lithography and reactive-ion etching to shape flakes with surprising fidelity. We leverage sub-nanometer height control and high spatial resolution to produce previously unattainable flake structures for a broad range of optoelectronic applications. For photonics, we fabricate microelements and show the straightforward transfer and integration of such elements by placing a spherical hBN microlens between two planar mirrors to obtain a stable, high-quality optical microcavity. We then decrease the patterning length scale to introduce Fourier surfaces for electrons, creating sophisticated, high-resolution landscapes in hBN, offering new possibilities for strain and band-structure engineering. These capabilities can advance the discovery and exploitation of emerging phenomena in hyperbolic metamaterials, polaritonics, twistronics, quantum materials, and 2D optoelectronic devices.

Hexagonal boron nitride nanophotonics: a record-breaking material for the ultraviolet and visible spectral ranges

Hexagonal boron nitride nanophotonics

High-Q Nanophotonics over the Full Visible Spectrum Enabled by Hexagonal Boron Nitride Metasurfaces

Freeform nanostructuring of hexagonal boron nitride

Nanoscale mapping and spectroscopy of non-radiative hyperbolic modes in hexagonal boron nitride nanostructures

Hexagonal Boron Nitride for Next‐Generation Photonics and Electronics

From the synthesis of hBN crystals to their use as nanosheets for optoelectronic devices

Photonic crystal cavities from hexagonal boron nitride

Sub-diffractional volume-confined polaritons in the natural hyperbolic material hexagonal boron nitride

Subdiffractional focusing and guiding of polaritonic rays in a natural hyperbolic material

Epitaxially grown semiconducting hexagonal boron nitride as a deep ultraviolet photonic material

From the synthesis of hBN crystals to their use as nanosheets in van der Waals heterostructures

Dielectric breakdown and sub-wavelength patterning of monolayer hexagonal boron nitride using femtosecond pulses

A hexagonal boron nitride super self-collimator for optical asymmetric transmission in the visible region

Narrowband quantum emitters over large spectral range with Fourier-limited linewidth in hexagonal boron nitride

Synthesis of Two-Dimensional Hexagonal Boron Nitride and Mid-Infrared Nanophotonics

An inverse-designed nanophotonic interface for excitons in atomically thin materials

High- Q dark hyperbolic phonon-polaritons in hexagonal boron nitride nanostructures

Engineering optically active defects in hexagonal boron nitride using focused ion beam and water

High-quality nanocavities through multimodal confinement of hyperbolic polaritons in hexagonal boron nitride