Abstract:Diamond is widely used in a series of industrial and scientific applications, including the micro-electro-mechanical systems, optical elements, ultra-precision machining tools, etc. Femtosecond laser beam machining is promising for high precision and high accuracy machining diamond material for its famous non-thermal machining regime. Initially, the laser ablation threshold was determined for the low and high laser fluence stage, respectively. Then, the ionization regime of femtosecond pulsed laser beam machining mono-crystalline diamond with different laser power was discussed. The influence of the ionization regime on laser machining also was analyzed basing on Raman analysis and laser machined surface topography. The laser ablation threshold was 0.29 J/cm(2) for the low laser fluence stage and 2.35 J/cm(2) for the high laser fluence stage, respectively. The calculation of the Keldysh parameter indicated that the multi-photon ionization prevailed in the low laser fluence stage while the tunneling ionization became dominant in the high laser fluence stage. The transition of the ionization regime from the multi-photon ionization to the tunneling ionization occurred around the laser fluence 3.2 J/cm(2). Graphitization of diamond material was discovered on laser machined diamond surface by means of Raman analysis. Graphitization would be enhanced by the tunneling ionization regime in the high laser fluence stage. A strong surface cracking tendency was also observed in laser machining in the high fluence stage. (C) 2018 Elsevier Ltd. All rights reserved.

Ablation mechanism investigation and ablation threshold prediction of single crystal diamond irradiated by femtosecond laser

Modeling of the temperature field in nanosecond pulsed laser ablation of single crystalline diamond

Experiment on Ablation Threshold of Single Crystal Diamond Produced by Femtosecond Laser Processing

Temperature evolution and material removal mechanisms in nanosecond-pulsed laser ablation of polycrystalline diamond

Atomistic Simulations of Ultrashort Pulsed Laser Ablation of Polycrystalline Diamond

Investigation on sapphire ablation by femtosecond-nanosecond dual beam laser

First-principles Electron Dynamics Control Simulation of Diamond under Femtosecond Laser Pulse Train Irradiation

A Prediction Model for Ablation Fluence Threshold in Femtosecond Laser Processing of Fused Silica

Ablation shape determination under ultrafast laser pulse irradiation

Research on the mechanism of micromachining of CVD diamond by femtosecond laser

Simulation of Femtosecond Laser Ablation Sapphire Based on Free Electron Density

The Mechanism of Ablation of Sapphire by an Ultra-Short Pulse Laser

Ablation induced by femtosecond laser in sapphire

The ablation process induced by femtosecond laser in transparent dielectrics

The Influence of the Ionization Regime on Femtosecond Laser Beam Machining Mono-Crystalline Diamond

Study of Femtosecond Ablation on Aluminum Film with 3D Two-Temperature Model and Experimental Verifications

On Ablation Characteristics Based on Two-Temperature Model Involving a Multivariate Lattice Heat Capacity by Ultrashort Laser-Irradiated in Zirconia

Predication of Ablation Depth and Crater Shape in Femtosecond Laser Micromachining of Wide Bandgap Materials

A Plasma Model Combined with an Improved Two-Temperature Equation for Ultrafast Laser Ablation of Dielectrics

Ablation Threshold Measurement and Chemical Modification of UV Nanosecond Laser Micromachining of Polycrystalline Diamond

Materials Removals During Femtosecond Laser Non-Thermal Ablation of Dielectrics