Abstract:The ablation threshold, depth and crater shape of fused silica for femtosecond laser processing are investigated theoretically and experimentally. Based on tracking the spatiotemporal distribution of the free electron density, free electron temperature, and laser intensity, the electron dynamics as well as the transient optical and thermophysical properties of femtosecond laser irradiated fused silica are quantitatively determined. The numerical model is validated by comparing the calculated threshold fluence, depth and crater shape of ablation with the experimentally measured ones at a wavelength of 800 nm. The free electron relaxation time at different laser fluences and pulse durations throughout the photoionization process and impact ionization process are probed. In the present work, the findings are as follows. 1) The electron relaxation time significantly affects the material optical properties and femtosecond laser energy absorption. The optical properties change dramatically. The fused silica becomes opaque for the case of laser irradiation with fluence higher than the ablation threshold. Moreover, the transition from electron-phonon collision to electron-ion collision accompanies with the femtosecond laser ablation of fused silica. 2) By using the proposed model, the experimentally observed saturation of ablation depth at high laser fluence is elucidated by the significant change of optical reflectivity and absorption coefficient. Both the results of theoretical simulation and experimental observation indicate that laser fluence has a strong influence on the shape of the ablation crater. The ablation volume increases sharply with the increase of laser fluence for femtosecond laser irradiation, compared with that for picosecond laser irradiation. 3) With the increase of femtosecond laser fluence, the ablation depth removal efficiency and ablation efficiency are both saturated, followed by slight decrements. The peak of ablation depth removal efficiency peak occurs at the femtosecond laser fluence close to 1.4 times of the ablation threshold. While the accuracy is slightly low due to the higher sensitivity of the ablation characteristics (ablation crater depth and ablation volume) to the shorter femtosecond laser pulse. For the femtosecond laser fluence higher than 3.5 times of the ablation threshold, good repeatability over a very wide fluence range can achieve accurate processing results, because a more consistent flat-bottom ablation profile tends to appear. However, the heat-affected zone leads the processing quality to degrade, compared with the scenario of femtosecond laser fluence close to the ablation threshold.

Simulation of Femtosecond Laser Ablation Sapphire Based on Free Electron Density

Investigation on sapphire ablation by femtosecond-nanosecond dual beam laser

Ablation induced by femtosecond laser in sapphire

Multiphoton Absorption Simulation of Sapphire Substrate under the Action of Femtosecond Laser for Larger Density of Pattern-Related Process Windows

The ablation process induced by femtosecond laser in transparent dielectrics

Ablation mechanism investigation and ablation threshold prediction of single crystal diamond irradiated by femtosecond laser

Predication of Ablation Depth and Crater Shape in Femtosecond Laser Micromachining of Wide Bandgap Materials

Energy Transport and Material Removal in Wide Bandgap Materials by A Femtosecond Laser Pulse

Ultrafast Photon-Electron Interactions in Dielectrics by a Single Laser Pulse

The Mechanism of Ablation of Sapphire by an Ultra-Short Pulse Laser

Ablation Of Crystalline Oxides By Infrared Femtosecond Laser Pulses

Femtosecond Laser Micro-Machining of Three-Dimensional Surface Profiles on Flat Single Crystal Sapphire

Temporal-spatial Dynamics of Electronic Plasma in a Femtosecond Laser-Induced Sapphire Microstructure.

Theoretical and Experimental Research of Femtosecond Laser Processing Fused Silica

Picosecond Laser Ablation of Millimeter-Wave Subwavelength Structures on Alumina and Sapphire

Molecular Dynamics Simulation on Femtosecond Laser Ablation of Metal

Ultra-short Laser Ablation of Dielectrics: Theoretical Analysis of Threshold Damage Fluence and Ablation Depth

Mechanisms In Fs-Laser Ablation In Fused Silica

Investigations of Femtosecond-Nanosecond Dual-Beam Laser Ablation of Dielectrics.

Numerical Simulation of Multi-Pulsed Femtosecond Laser Ablation: Effect of a Moving Laser Focus

Theoretical and Experimental Study of Energy Transportation and Accumulation in Femtosecond Laser Ablation on Metals