Performance Enhancement and Mechanism Exploration of All-Carbon-nanotube Memory with Hydroxylation and Dehydration Through Supercritical Carbon Dioxide

Xiaofang Wang,Chang,Ziwei Zhang,Qi Liu,Lei Li,Shenhui Ma,Min Zhang
DOI: https://doi.org/10.1016/j.carbon.2020.10.084
IF: 10.9
2020-01-01
Carbon
Abstract:Carbon nanotubes based non-volatile memories (NVMs) with excellent electronic properties can provide high bit density and energy efficiency. But with the limit of the process conditions, obtaining steep flanks with large hysteresis is still a challenge, while it is the prerequisite for stable program/erase/read operations. Herein, we adopt a novel treatment of supercritical CO2 (SCCO2) fluids to improve the performance of all-carbon-nanotube thin-film transistor (A-CNT-TFT) memory elements. By the treatment, the transfer characteristics of the A-CNT-TFTs achieve a 13.20 V hysteresis window, which is larger than 50% of the whole sweeping-voltage range. The disappearance of hump effect greatly improves the switching characteristics. The material analysis confirms that the SCCO2 fluids can reduce the defects in dielectric layer sufficiently and strengthen the connection between channel and gate dielectric. Furthermore, it is proposed that existence of hydroxyl groups in the carbon nanotubes contributes dominantly to the mechanism for charge storage, and the SCCO2 treatment enhances the charge storage by increasing the number of the hydroxyl groups. The work shows that the low-temperature SCCO2 treatment can better improve the performance of A-CNT-TFTs, which provides a promising option for nonvolatile charge storage memory devices. (c) 2020 Elsevier Ltd. All rights reserved.
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