Abstract:Recent advancements in integrated soliton microcombs open the route to a wide range of chip-based communication, sensing, and metrology applications. The technology translation from laboratory demonstrations to real-world applications requires the fabrication process of photonics chips to be fully CMOS-compatible, such that the manufacturing can take advantage of the ongoing evolution of semiconductor technology at reduced cost and with high volume. Silicon nitride has become the leading CMOS platform for integrated soliton devices, however, it is an insulator and lacks intrinsic second-order nonlinearity for electro-optic modulation. Other materials have emerged such as AlN, LiNbO3, AlGaAs and GaP that exhibit simultaneous second- and third-order nonlinearities. Here, we show that silicon carbide (SiC) -- already commercially deployed in nearly ubiquitous electrical power devices such as RF electronics, MOSFET, and MEMS due to its wide bandgap properties, excellent mechanical properties, piezoelectricity and chemical inertia -- is a new competitive CMOS-compatible platform for nonlinear photonics. High-quality-factor microresonators (Q = 4 × 106) are fabricated on 4H-SiC-on-insulator thin films, where a single soliton microcomb is generated. In addition, we observe wide spectral translation of chaotic microcombs from near-infrared to visible due to the second-order nonlinearity of SiC. Our work highlights the prospects of SiC for future low-loss integrated nonlinear and quantum photonics that could harness electro-opto-mechanical interactions on a monolithic platform.

Advances in Nonlinear CMOS Photonics

Computational methods and techniques for nonlinear optics

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Nonlinear Optical Signal Processing in CMOS-compatible Ultra-Silicon-rich Nitride Devices

Nonlinear Third Order Silicon Photonics Enabled by Dispersion and Subwavelength Engineering

Ultra-silicon-rich Nitride Based Devices for High Nonlinear Figure of Merit Photonics Applications

Nonlinear photonics on integrated platforms

Kerr Nonlinear Optical Signal Processing in Ultra-silicon-rich Nitride-based Devices

Toward Fully Integrated Nonlinear Photonics

Optical nonlinear devices

Soliton formation and spectral translation into visible on CMOS-compatible 4H-silicon-carbide-on-insulator platform

Silicon Coupled Cavities As a Flexible Platform for Integrated Nonlinear Photonics

Silicon Photonic Network-on-chip and Enabling Components

Hybrid Silicon Nonlinear Photonics [Invited]

Nonlinear Nano-Photonics

Toward in-fiber nonlinear silicon photonics

Advanced Progress On Chi((3)) Nonlinearity In Chip-Scale Photonic Platforms

Nonlinear Optical Polymers and Nanophotonic Devices: Nanofabrication of Devices Based on Nanocrystals-Embedded Polymers, Uv-Assisted Nanoimprinting, and Ring-Resonator Planar Lightwave Circuitry

Integrated Nonlinear Photonics and Emerging Applications

Silicon Core Fibers for Nonlinear Photonics: Applications and Emerging Trends

Nonlinear and quantum photonics using integrated optical materials