Investigation of Superconducting Titanium Films for Transition Edge Sensors

Xiaolong Xu,Jinjin Li,Xueshen Wang,Qing Zhong,Yuan Zhong,Wenhui Cao,Wei Li,Jian Chen,Zhiwei Zhao,Ying Gao,Zheng Liu,Qing He
DOI: https://doi.org/10.1109/cpem49742.2020.9191808
2020-01-01
Abstract:High performance transition-edge sensors (TES) require the superconducting thin films with suitable critical temperature ( $T_{c}$ ) for different applications. In this paper, we fabricate and characterize superconducting titanium (Ti) films for a He-3 cryogenic TES system with a sputtering technique. correlation between resistivity and transition temperature has analyzed. The sputtering pressure, power and film thickness are investigated to realize the modulation of $T_{c}$ range from 462 mK to 552 mK.
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