Effect of Nb Doping Concentration on Transparent Conductivity of TiO2 Films Fabricated by Sol-Gel Method

Lu Yan,Cong Bingjun,Wang Kangkai,Liu Yong,Han Gaorong,Song Chenlu
2016-01-01
Rare Metal Materials and Engineering
Abstract:Nb doped TiO2 films (TNO) were fabricated by a sol-gel method and then subjected a post-annealing process in H-2. X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscope (SEM) and Hall measurement were applied to investigate the structure, crystallization, composition, conductivity and transmitivity of the films. The results show that the conductivities of TNO films decrease with Nb atom concentration increasing after post-annealing. The lowest square resistance of the TNO films is determined to be similar to 4.2 x 10(4) Omega/square in Nb-0.08:Ti0.92O2, and the transmitivity reaches up to 70%.
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