Two-step anodization fabrication of ordered ZrO2 nanotube arrays

Yanhui Chen,Gengmin Zhang,Ziyong Shen
2015-01-01
Journal of the Australian Ceramic Society
Abstract:The two-step anodization method has been proved effective in manufacturing ordered nanotube arrays of zirconium dioxide (ZrO2). In each fabrication, ordered imprints were left on the Zr substrate after the removal of the nanotubes obtained in the first-step anodization. With these imprints as a template, the second-step anodization could commence at the sites with a regular spatial distribution and an ordered ZrO2 nanotube array was eventually attainable. In comparison with other oxides, the two-step anodization fabrication of the ZrO2 nanotubes demonstrated some unique aspects. First, for a clean surface, the contaminants that covered the ZrO2 nanotube ends should be removed in a treatment with either sulfuric acid (H2SO4) or inductive coupled plasma (ICP). Second, the crystallization started during the anodization even without a heat treatment.
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