Abstract:A novel sensitivity improving method for simultaneously measuring five-degree-of-freedom errors of a moving linear stage is proposed based on collimator and interferometry techniques. The measuring principle and parameters of the system are analyzed theoretically. The experimental results proved that the resolution of the linear displacement of the proposed method has twice that of the current linear interferometer, and the resolutions of the two-dimensional straightness error measurement can be improved by a factor of 8 compared with the movement of the retroreflector itself by using multireflection and lens magnification. The resolutions of the pitch and yaw angular error measurement have been improved by a factor of 10 compared with the rotation of the plane mirror itself by using expander lenses. The whole measuring system is characterized of simple structure, small volume, and high precision. The moving component of the measurement system is wireless, which eliminates the errors and inconvenience introduced by the wire connection. Calibration and comparison tests of this system compared with Renishaw laser interferometer system have been carried out. Experimental results show good consistency for measuring a linear guide way.

Parallel Beam Generation Method for a High-Precision Roll Angle Measurement with a Long Working Distance

High-Accuracy Method for Measuring Two-Dimensional Angles of A Linear Guideway

A Systemic Model for Simultaneously Measuring Three dimensional Rotation Angles of the Linear Guide Track [J]

Development of Equipment for Simultaneously Measuring Two-dimensional Rotation Angles of the Linear Guide Track

A Novel Method to Simultaneously Measure the Straightness

Roll angle measurement based on common path compensation principle

A Novel Method To Enhance The Sensitivity For Two-Degrees-Of-Freedom Straightness Measurement

An Axial Displacement Measurement Relying on the Double-Helix Light Beam

Measuring Roll Angle Displacement Based on Ellipticity with High Resolution and Large Range

Simultaneous Measuring Method Of Linear Guide Geometric Errors In Four-Degrees Of Freedom

A High-Precision Five-Degree-Of-Freedom Measurement System Based on Laser Collimator and Interferometry Techniques

Precision Roll Angle Measurement System Basedon Autocollimation

Long Focal-Length Measurement Using Divergent Beam and Two Gratings of Different Periods.

1502 Precision Measurement of Vertical Straightness of a Roll Workpiece on an Ultra-Precision Lathe

Full-aperture Long Focal-Length Measurement Based on Divergent Beam

A New Optical Angle Measurement and Compensation

A Novel Enhanced Roll-Angle Measurement System Based on a Transmission Grating Autocollimator

Measuring Parallelism of Two Parallel Narrow Beams Based on Differential Defocusing Principle

Measuring Parallelism for Two Thin Parallel Beams Based on Autocollimation Principle

S4-4 angle measurement method based on the duel gratings combination

Heterodyne Interferometer with Two Parallel-Polarized Input Beams for High-Resolution Roll Angle Measurement.