Abstract:3D printing of metallic microstructures is highly desirable for many practical applications such as microelectronics, terahertz photonics, microelectromechanical systems, and electrochemisty. Unfortunately, high resolution microprinting of 3D metal structures with widely tunable feature sizes, high conductivities, high melting points, and highly smooth surfaces remains challenging for current microfabrication technologies. Herein, 3D printing of metallic microstructures of feature sizes ranging from ≈10 to ≈200 μm by combining femtosecond laser micromachining of 3D glass microchannels and microfluidic electroless plating is demonstrated. The proposed technique allows for producing 3D metallic structures of almost arbitrary geometries embedded in glass since the continuous flow of the plating solution enables controllable deposition of metal films inside the through microchannels. Moreover, freestanding metallic 3D microstructures are fabricated by removing the glass matrix with a wet chemical etching. As a nonthermal processing, the surface roughness of the fabricated metallic structures is as low as ≈20 nm. The 3D microstructures can be made of either silver or copper covered with a thin layer of silver, which are shown to have a high conductivity. As a proof‐of‐concept demonstration, a 3D metal scaffold structure with a size of ≈5 × 5 × 2 mm3 is printed. Glass‐channel molding assisted 3D printing of free‐standing metal microstructures is demonstrated using femtosecond laser internal processing and microfluidic electroless plating. Using this approach, 3D metal microstructures with widely tunable feature sizes (10–200 µm), flexible configurations, high conductivity, and high surface smoothness can be printed.

Fabrication of Embedded Submicron Metal Lines on Glass Surfaces

Laser Direct Fabrication of Silver Conductors on Glass Boards

Robust metallic micropatterns fabricated on quartz glass surfaces by femtosecond laser-induced selective metallization

Research on Structure Property of Thick-Film Conductive Lines Fabricated by Laser Micro-Fine Cladding and Flexibly Direct Writing

Flexible nanowiring of metal on nonplanar substrates by femtosecond-laser-induced electroless plating.

Glass‐Channel Molding Assisted 3D Printing of Metallic Microstructures Enabled by Femtosecond Laser Internal Processing and Microfluidic Electroless Plating

Fabrication of Shape‐Controlled Copper Line Arrays by Meniscus‐Confined 3D Microprinting on Insulating Substrates

Selective Deposition of Conductive Copper Films on Glass Surfaces Using Femtosecond Laser Surface Modification and Electroless Plating

Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing.

Selective metallization of Ag2O-dope silicate glass by femtosecond laser direct writing

Mask-free, vacuum-free fabrication of high-conductivity metallic nanowire by spatially shaped ultrafast laser (Conference Presentation)

Nano-fabrication with Metallic Glass—an Exotic Material for Nano-Electromechanical Systems

An Additive Method to Fabricate Conductive Lines and Electronic Components Directly by Laser Microcladding Electronic Materials

Flexible metal patterning in glass microfluidic structures using femtosecond laser direct-write ablation followed by electroless plating

Processing Precision of Femtosecond Laser Induced Silver Nanowiring

Three-dimensional silver nanowiring by femtosecond laser-induced photoreduction from solution

Fabrication of Metal Nano-Wires by Laser Interference Lithography Using a Tri-Layer Resist Process

Rapid fabrication of conductive copper patterns on glass by femtosecond Laser-Induced reduction

Continuous-Wave Laser Patterning of Three-Dimensional Microstructure in Glasses Containing Silver Nanoparticles

Flexible Nozzle Based Liquid Metal Direct Writing System Assisted in Patterned Silicon Nanowires

Deposition and CMP of Sub 100nm Silver Damascene Lines