Abstract:Silicon nitride (SiN) is a promising material platform for integrating photonic components and microfluidic channels on a chip for label-free, optical biochemical sensing applications in the visible to near-infrared wavelengths. The chip-scale SiN-based optofluidic sensors can be compact due to a relatively high refractive index contrast between SiN and the fluidic medium, and low-cost due to the complementary metal-oxide-semiconductor (CMOS)-compatible fabrication process. Here, we demonstrate SiN-based integrated optofluidic biochemical sensors using a coupled-resonator optical waveguide (CROW) in the visible wavelengths. The working principle is based on imaging in the far field the out-of-plane elastic-light-scattering patterns of the CROW sensor at a fixed probe wavelength. We correlate the imaged pattern with reference patterns at the CROW eigenstates. Our sensing algorithm maps the correlation coefficients of the imaged pattern with a library of calibrated correlation coefficients to extract a minute change in the cladding refractive index. Given a calibrated CROW, our sensing mechanism in the spatial domain only requires a fixed-wavelength laser in the visible wavelengths as a light source, with the probe wavelength located within the CROW transmission band, and a silicon digital charge-coupled device/CMOS camera for recording the light scattering patterns. This is in sharp contrast with the conventional optical microcavity-based sensing methods that impose a strict requirement of spectral alignment with a high-quality cavity resonance using a wavelength-tunable laser. Our experimental results using a SiN CROW sensor with eight coupled microrings in the 680 nm wavelength reveal a cladding refractive index change of ~1.3 × 10−4 refractive index unit (RIU), with an average sensitivity of ~281 ± 271 RIU−1 and a noise-equivalent detection limit of 1.8 × 10−8 ~ 1.0 × 10−4 RIU across the CROW bandwidth of ~1 nm.

Porous silicon-based two-dimensional photonic crystal for biochemical sensing applications

Silicon optical waveguides using photonic bandgap for bioparticle sensing

1D porous silicon photonic crystals comprising Tamm/Fano resonance as high performing optical sensors

Porous Silicon Based on Multilayer Dielectric‐grating Optical Sensors with Enhanced Biosensing

Silicon-on-Insulator Nanowire Based Optical Waveguide Biosensors

Study of Photonic Crystal Cavities for Biosensors

Resonant Mode Engineering of Photonic Crystal Sensors Clad with Ultralow Refractive Index Porous Silicon Dioxide

Optical Fano Resonance Sensing of Bilayer Asymmetric Photonic Crystal Slabs As Biosensors.

Highly-Sensitive Optical Biosensors Based on Silicon-On-Insulator Nanowire Waveguide

Photonic crystal-based optical biosensor: a brief investigation

Multiparameter-detecting Biosensors Based on the Surface and Waveguide Modes of the Two-Dimensional Photonic Crystal Slab

Analysis and Design of Refractive Index Biosensors Based on Single Silicon Nanobeam Cavity

Three-dimensional/two-dimensional photonic crystal hydrogels for biosensing

High-sensitivity silicon photonic biosensors based on cascaded resonators

Design of a highly sensitive photonic crystal waveguide platform for refractive index based biosensing

Label-free Biosensing Using a Photonic Crystal Structure in a Total-Internal-reflection Geometry

Physical analysis of the response properties of porous silicon microcavity biosensor

Design of a High Q-Factor Label-Free Optical Biosensor Based on a Photonic Crystal Coupled Cavity Waveguide

Silicon-Nitride-Based Integrated Optofluidic Biochemical Sensors Using a Coupled-Resonator Optical Waveguide

High-Q Width Modulated Photonic Crystal Stack Mode-Gap Cavity and Its Application to Refractive Index Sensing.

Design of 2D photonic crystal biosensor to detect blood components