Abstract:So far, nanostructuring of hard optical crystals has been exclusively limited to their surface, as stress-induced crack formation and propagation render high-precision volume processes ineffective<a data-track="click" data-track-action="reference anchor" data-track-label="link" data-test="citation-ref" aria-label="Reference 1" title="Gamaly, E. G. et al. Laser–matter interaction in the bulk of a transparent solid: confined microexplosion and void formation. Phys. Rev. B 73, 214101 (2006)." href="/articles/s41566-018-0327-9#ref-CR1" id="ref-link-section-d351e438">1</a>,<a data-track="click" data-track-action="reference anchor" data-track-label="link" data-test="citation-ref" aria-label="Reference 2" title="Juodkazis, S., Mizeikis, V. & Misawa, H. Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications. J. Appl. Phys. 106, 051101 (2009)." href="/articles/s41566-018-0327-9#ref-CR2" id="ref-link-section-d351e441">2</a>. Here, we show that the rate of nanopore chemical etching in the popular laser crystals yttrium aluminium garnet and sapphire can be enhanced by more than five orders of magnitude (from <0.6 nm h−1 to ~100 µm h−1) by the use of direct laser writing, before etching. The process makes it possible to produce arbitrary three-dimensional nanostructures with 100 nm feature sizes inside centimetre-scale laser crystals without brittle fracture. To showcase the potential of the technique we fabricate subwavelength diffraction gratings and nanostructured optical waveguides in yttrium aluminium garnet and millimetre-long nanopores in sapphire. The approach offers a pathway for transferring concepts from nanophotonics to the fields of solid-state lasers and crystal optics.

Fabrication of Ge 2 Sb 2 Te 5 crystal micro/nanostructures through single-shot Gaussian-shape femtosecond laser pulse irradiation.

Fabrication of Nanostructures on 6H SiC Crystal Induced by Femtosecond Laser

Space-selective Precipitation of Ge Crystalline Patterns in Glasses by Femtosecond Laser Irradiation.

Crystallization of Amorphous Ge2Sb2Te5 Films Induced by a Single Femtosecond Laser Pulse

Laser microstructuring of Si surfaces for low-threshold field-electron emission

Fetntosecond laser-induced crystallization in as-deposited Ge1Sb2Te4 fihns

Laser Induced Crystallization of As-Deposited Amorphous Ge2Sb2Te5 Films

One-Step femtosecond laser irradiation of Single-Crystal Silicon: Evolution of Micro-Nano structures and damage investigation

Preparation and Characterization of Laser-Irradiation Induced Amorphous for Ge 2 Sb 2 Te 5 Phase-Change Materials

Crystallization mechanism and course of the Ge2Sb2Te5 thin films under focused pulse laser

Interaction of low-fluence femtosecond laser pulses with a composite layer containing Ge nanoclusters: A novel type of nanofoam formation

Formation of Si Nanocrystals in Glass by Femtosecond Laser Micromachining

Transmission electron microscopy characterizations of local amorphization of single crystal silicon by nanosecond pulsed laser direct writing

Nanofabrication in transparent materials with a femtosecond pulse laser

Microstructural modification of chalcogenide glasses by femtosecond laser

High-Efficiency Fabrication of Geometric Phase Elements by Femtosecond-Laser Direct Writing

Three-dimensional femtosecond laser nanolithography of crystals

Tailored engineering of crystalline surface enabled by ion-irradiation-assisted femtosecond laser ablation

Space-selective Precipitation and Control of Functional Crystals in Glasses by a Femtosecond Laser

Optimization of GeSn Nanostructures Via Tuning of Femtosecond Laser Parameters

Free‐Form Micro‐Optics out of Crystals: Femtosecond Laser 3D Sculpturing