Two Stage Pure Gas and Single Stage Mixture Gas Microcooler Developments at University of Twente

H. Cao,J. H. Derking,H. J. Holland,D. Zalewski,C. Vermeer,S. Vanapalli,P. Lerou,T. Tirolien,M. Crook,H. T. Brake
2012-01-01
Abstract:The development of micromachined Joule-Thomson (JT) coolers has been an on-going and successful research project at the University of Twente for many years. In this research, we develop MEMS-based cryocooling systems for cooling small electronic devices, such as amplifiers and infrared sensors, to improve their performance. After successfully fabricating and testing single-stage JT microcoolers with cooling capacities of around 10 mW at 100 K, we now present the development of two-stage pure gas microcooler and of single-stage microcooler that operates with gas mixtures. The first stage of the two stage cooler operates with nitrogen gas between 85.0 and 1.1 bar and the second stage with hydrogen gas between 70.0 and 1.0 bar. The mass flow in the first and second stage is 16.7 mg s and 0.93 mg s, respectively, result in a cooling power of 21 mW at 95 K and 30 mW at 32 K. The single-stage microcooler is designed and produced for operating with hydrocarbon gas mixtures. This microcooler is powered with a linear compressor to obtain a closedcycle cooler. Operating with a ternary mixture of methane, ethane and isobutane between 9.4 and 1.3 bar, a net cooling power of 46 mW at 150 K is obtained at a mass flow of 1.35 mg s.
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