Error Compensation for Eccentric Motions of Circular Gratings

Guo Yangkuan,Li Yuhe,Li Qingxiang,Gong Juan,CHEN Zhangwei
DOI: https://doi.org/10.3321/j.issn:1000-0054.2005.02.010
2005-01-01
Abstract:A compensation method was develped for the measurement errors caused by eccentric motions for a circular grating derived from a straight-line grating. The operating principle of the circular grating is described with an expression for the moire fringes that can be used to assess the measurement accuracy of circular gratings caused by its eccentric motion. Analysis of an actual example shows the necessity of the compensation for the eccentric by errors. Tests show that with small eccentricities, the system will work normally, but the measured results are not correct. The theoretically derived compensation guarantees the grating measurement accuracy.
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