Current Status and Applications of Micro-assembly Technology

DUAN Rui-ling,LI Yu-he,LI Qing-xiang
DOI: https://doi.org/10.3969/j.issn.1007-1180.2005.07.006
2005-01-01
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Abstract:Along with the development of MEMS,micro-assembly technology is developing rapidly in recent years,a large number of researchers of the world are gradually realizing the great significance of the study of micro-assembly and micro manipulation technology.The significance of studying micro-assembly and its far influence on MEMS are analized,then the current status in the development of micro-assembly and some important research results from several research institutions participating in micro-assembly are introduced.Finally,some future prospects of micro-assembly are presented.
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