Application and Development Tendency of MEMS Technique in the Fields of Navigation,Guidance and Control

ZHOU Feng-qi,LIU Zhi-ping,ZHOU Jun

DOI: https://doi.org/10.3969/j.issn.1000-8829.2007.03.002

2007-01-01

Abstract:The technical development and application of micro-electro-mechanical system in recent years is reported,especially the application of sensors and actuators based on MEMS in the fields such as navigation,guidance and control is described thoroughly.Some key issues to be tackled in the near future are also listed finally.