A MICROMANIPULATOR SYSTEM FOR ASSEMBLYING MICRO ELEMENTS
Wei ZHENG,Yuxian XU,Qingxiang LI
DOI: https://doi.org/10.3321/j.issn:1002-0446.1999.01.003
1999-01-01
ROBOT
Abstract:Microassembly is one of the key factors for micro electro mechanical systems. In this paper, a manipulator system for assemblying micro elements which is based on the properties and requirments of microassembly technology is presented. Design features of each components of this system are described and the methods to achieve these features are analysed.
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