Design of Micro Tunneling Magnetometer and Research on its Fabrication Process

朱俊华,周兆英,叶雄英,张大成,郝一龙,李婷
2001-01-01
Abstract:A novel micro magnetometer based on electron tunneling isintroduced. The key fabrication processes are analyzed and studied by experiments. The dissolved wafer process is used to fabricate thin films and the structures can be patterned on both sides of the films , which enhance the ability of micromachining.
What problem does this paper attempt to address?