Step Height Measurement with Tunable Diode Laser

JIANG Tian-gang,LI Yan,WANG Xin,ZHANG Shu-lian
DOI: https://doi.org/10.3969/j.issn.1001-5078.2005.07.018
2005-01-01
Abstract:In this paper,several non-contact optical methods of measurement of step height are introduced in brief,and the absolute distance interferometry with diode laser is emphasized hereinto.We conceive a CSWC ADI system with tunable diode laser to measure the step height in nanometer scale,and analyze the theoretic uncertainty of the experiment.
What problem does this paper attempt to address?