Abstract:We present a femtosecond laser-based interferometry for step-structure surface measurement with a large field of view. A height axial scanning range of 348 mu m is achieved by using the method of repetition frequency scanning with reference to the Rb atomic clock and the optical path length difference design for 21 times of the pulse interval. A combined method, which includes the envelope peak positioning method for rough measurement, synthetic-wavelength interferometry for connection, and carrier wave interferometry for fine measurement, is proposed to reconstruct the surface. A three-step specimen with heights of approximately 20, 50, and 70 mu m was successfully measured with a height precision of 7 nm, and the accuracy was verified by a commercial white light interferometer. The diameter of the field of view that was demonstrated was 17.3 mm, which could be much larger owing to the high spatial coherence of the femtosecond laser. The results show that the femtosecond laser system combines the step-structure measurement performance of white light interferometry and the high-precision large-field performance of phase shifting interferometry, indicating its potential for widespread use in ultra-precision manufacturing of micro/nano-devices, such as semiconductor chips, integrated circuits, and micro-electro-mechanical systems. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Simple Tunable Dual-Wavelength Fiber Laser and Multiple Self-Mixing Interferometry to Large Step Height Measurement.

Double-wavelength Optical Fiber Laser and Its Application for Large Step Height Measurement

High precision on-line measurement of step height based on fiber dual-wavelength interferometry

Tunable V-Coupled-Cavity Semiconductor Laser Monolithically Integrated with Monitoring Photodiodes Using Deeply Etched Reflective Trenches

Absolute distance measurement without dead zone based on dual-channel dispersive interferometry using the femtosecond laser

Wavelength-Spacing Tunable Multi-Wavelength Erbium-Doped Fiber Laser Incorporating A Semiconductor Optical Amplifier

Stable Multi-Wavelength Erbium-Doped Fiber Laser by Using Dispersion-Shifted Fiber

Wavelength-spacing continuously tunable multiwavelength erbium-doped fibre laser based on DSF and MZI

Step Height Measurement with Tunable Diode Laser

Self-Mixing Interference Measurement System of A Fiber Ring Laser with Ultra-Narrow Linewidth

Time-of-flight Detection of Femtosecond Laser Pulses for Precise Measurement of Large Microelectronic Step Height

Stable Dual-Wavelength DFB Fiber Laser With Separate Resonant Cavities and Its Application in Tunable Microwave Generation

Large-field step-structure surface measurement using a femtosecond laser

Fiber self-mixing interferometer with orthogonally polarized light compensation.

Method for Improving the Accuracy of Step Height Measurement Based on Optical Frequency Comb

Optical Fiber Displacement Sensing System Based on Dual-Wavelength with Single-Wavelength Interferometry

High-accuracy Self-Mixing Interferometer Based on Single High-Order Orthogonally Polarized Feedback Effects

System to Measure Step Hight by Combining Dual-frequency Interferometry and Confocal Microscopy

A Switchable and Tunable Dual-Wavelength Actively Mode-Locked Fiber Laser Based on Dispersion Tuning

Common-path Heterodyne Self-Mixing Interferometry with Polarization and Frequency Multiplexing

Study of Cascaded Tunable DFB Semiconductor Laser with Wide Tuning Range and High Single Mode Yield Based on Equivalent Phase Shift Technique