XPS Study of Porous Silicon

王燕,岳瑞峰
DOI: https://doi.org/10.3969/j.issn.1004-4957.2001.01.009
2001-01-01
Abstract:The surface properties of two kinds of porous silicon(PS)samples—fresh PS which was dipped in HF solution before experiment and the aged PS which has been stored in the air for one year-were examined by X-ray photoelectron spectroscopy. The fresh PS surface has only trace O and F, O exists in the form of OH-, which is related to replacement of F- with OH- in cleaning process. The PS is gradually oxidated on the surface and SiO2 is formed, when it is stored in the air. Therefore, the fresh PS and aged PS have different surface forms, both of them have strong photoluminescence, but they have different origins of luminescence.
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