The Humidity-Induced Sensitivity Amplification Effect in an Ionization Gas Sensor with Silicon Nanostructures

Bo Wang,Xusheng Dong,Zi Wang,Yanfang Wang,Zhongyu Hou
DOI: https://doi.org/10.1109/led.2020.2987948
IF: 4.8157
2020-01-01
IEEE Electron Device Letters
Abstract:This letter reports a significantly amplified response towards organic and inorganic target gases induced by a small variation of humidity for an ionization sensor, which is based on silicon hybrid micro-nanostructures. By introducing Si nanowire arrays using metal-assisted chemical etching, a boosted dynamic range could be achieved with increasing relative humidity read from I-V characteristics. With dry air as carrier gas, the 5000-ppm ethanol vapor sample of 60% relative humidity showed almost two magnitude higher response and signal-to-noise ratio than those of dry ethanol vapor. This humidity amplification effect brought by micro-needle array -Si nanowires hierarchical structure renders the devices especially suitable for working under highly humid environments with optimal performance.
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