Abstract:We exploited the oxide shell structure to explore the structure confinement effect on the nickel silicide growth in one-dimensional nanowire template. The oxide confinement structure is similar to the contact structure (via hole) in the thin film system or nanoclevices passivated by oxide or nitride film. Silicon nanowires in direct contact with nickel pads transform into two phases of nickel silicides, Ni31Si12 and NiSi2, after one-step annealing at 550 degrees C. In a bare Si nanowire during the annealing process, NiSi2 grows initially through the nanowire, followed by the transformation of NiSi2 into the nickel-rich phase, Ni31Si12 starting from near the nickel pad. Ni31Si12 is also observed under the nickel pads. Although the same phase transformations of Si to nickel silicides are observed in nanowires with oxide confinement structure, the growth rate of nickel suicides, Ni31Si12 and NiSi2, is retarded dramatically. With increasing oxide thickness from 5 to 50 nm, the retarding effect of the Ni31Si12 growth and the annihilation of Ni2Si into the oxide confined-Si is clearly observed. Ni31Si12 and Ni2Si phases are limited to grow into the Si/SiOx core-shell nanowire as the shell thickness reaches similar to 50 nm. It is experimental evidence that phase transformation is influenced by the stressed structure at nanoscale.

Large Scale Synthesis of Si3N4@SiOx Core-Shell Structure Nanowires by Direct Nitridation

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Mass Production of Α-Silicon Nitride Single-crystalline Nanowires

A simple method to synthesize Si3N4 and SiO2 nanowires from Si or Si/SiO2 mixture

Synthesis and Characterization of Α-Phase Silicon Nitride Powders by Direct Nitridation

Direct Synthesis of Α-Silicon Nitride Nanowires from Silicon Monoxide on Alumina

Non-catalytic vapor synthesis of millimeter-scale α-Si 3 N 4 nanowires from oxidized silicon powders

Catalyst-assisted Synthesis of Core–shell SiC/SiO 2 Nanowires Via a Simple Method

Growth of nickel silicides in Si and Si/SiOx core/shell nanowires.

Non-catalytic Vapor Synthesis of Α-Si3n4 Nanowhiskers Via Direct Nitridation of Silicon Powders

Large-Scale Synthesis of Si3n4 Nanowires by a Modified Carbothermal Reduction Method Using Graphite Felt As Growth Substrate

Synthesis of Α Silicon Nitride Single-Crystalline Nanowires by Nitriding Cryomilled Nanocrystalline Silicon Powder

Large-scale synthesis, microstructure and growth mechanism of self-assembled core–shell ZnO/SiOx nanowires

Synthesis and Carbothermal Nitridation Mechanism of Ultra-Long Single Crystal Α-Si3n4 Nanobelts

Kinetic study of the oxide-assisted catalyst-free synthesis of silicon nitride nanowires

Bulk Synthesis of Long Silicon Nitride Nanowires on Silicon Wafer

Long Silicon Nitride Nanowires Synthesized in a Simple Route

Preparation of α-Si_3N_4 Nanowires from Amorphous Si-C-N

Synthesis and Characterization of Several alpha-Silicon Nitride Nanostructures

Large-Scale Production of Amorphous Silicon Oxynitride Nanowires by Nickel-Catalyzed Transformation of Silicon Wafers in NH3 Plasma

Large-scale synthesis of Si 3 N 4 nanowires by a modified carbothermal reduction method using graphite felt as growth substrate