Abstract:Focal plane array (FPA) detector has characteristics of low cost, operating at room temperature, compatibility with the silicon CMOS technology and high detecting performance, therefore it becomes a hot spot in infrared (IR) or terahertz (THz) detect field recently. However, the tradition structure of micro-bolometer has the conflict of the pixel size and thermal performance. In order to improve the detecting performance of small pixel size bolometer, high fill factor and low thermal conductance design should be considered. In IR detecting, double layers structure is an efficient method to improve the absorption of micro-bolometer and reduce thermal conductance. The three dimension model of small size micro-bolometer was built in this article. The thermal and mechanical characters of those models were simulated and optimized, and finally the double layer structure micro-bolometer was fabricated with multifarious semiconductor recipes on the readout integrated chip wafer. For THz detecting, to improve the detecting performance, different dimension THz detectors based on micro-bridge structure were designed and fabricated to get optimizing micro-bolometer parameters from the test results of membrane deformation. A nanostructured titanium thin film absorber is integrated in the micro-bridge structure of the VOx micro-bolometer to enhance the absorption of THz radiation. Continuous-wave THz detection and imaging are demonstrated with a 2.52 THz far infrared CO2 laser and fabricated 320x240 vanadium oxide micro-bolometer focal plane array with optimized cell structure. With this detecting system, THz imaging of metal concealed in wiping cloth and envelope is demonstrated.

Design and Fabrication of Low-Deformation Micro-Bolometers for THz Detectors

Design And Fabrication Of Micro-Bolometer Array With Double Layers Structure

Orthogonal Design of Multilayer Thin Film Residual Stress Impact on the Thz Micro Bridge Deformation

Advanced design of microbolometers for uncooled infrared detectors

Deformation Analysis of Bolometer Micro-bridges

Focal Plane Array Detectors With Micro-Bolometer Structure And Its Application In Ir And Thz Imaging

Terahertz Metamaterial-Based Microbolometers Fabricated by Conventional MEMS

OPTICAL AND THERMAL DESIGN FOR MICROBOLOMETER

Thin Film Like Terahertz Bolometric Detector on Bi2212 Single Crystal

Fabrication and Parameters Calculation of Room Temperature Terahertz Detector with Micro-Bridge Structure

Simulation of structures for two-layer infrared microbolometers

Nb5N6 microbolometers integrated with diffractive lens for THz imaging

Fabrication of Bi2212 Single Crystal Bolometer for Detection of Terahertz Waves

An Optimization Approach for 25um Pitch Microbolometers

Design and Simulation of Microbolometer with Dual Cavity for High Figure of Merits

Simulation of Microbolometers Based on A-Si:H Thin Films with Thermal and Mechanical Performance

Simulation Of Micro-Bolometer Using Double Sacrificial Layers Structure

Diffractive microlens integrated into Nb 5 N 6 microbolometers for THz detection

Enhancement of Real-Time THz Imaging System Based on 320 × 240 Uncooled Microbolometer Detector

Optical Optimization and Simulation of Micro-bolometers Based on Α-Si:H Thin Film

An Investigation on Diffractive Micro-Lens Array Used in Thz Imaging