Terahertz Metamaterial-Based Microbolometers Fabricated by Conventional MEMS

Tianhong Ao,Xiangdong Xu,Yu Gu,Zhegeng Chen,Yadong Jiang,Xinrong Li,Yuxiang Lian,Fu Wang,Qiong He
DOI: https://doi.org/10.4236/opj.2016.68b036
2016-01-01
Optics and Photonics Journal
Abstract:37 μm × 37 μm array of metamaterial-based microbolometers was designed and successfully fabricated by conventional MEMS technology.FTIR measurements reveal that the as-designed microbolometers exhibit a high absorption of ∼31.5% at 3.93 THz.In contrast, no response can be detected from those microbolometers without metamaterials.The experimental results have been confirmed by simulations.
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