Abstract:State-of the-art infrared photodetectors operating in the mid- and long-wavelength infrared (MWIR and LWIR) are largely dominated by cryogenically cooled quantum sensors when the target is the highest sensitivity and detection speeds. Nano-thermoelectrics provide a route towards competitive uncooled infrared bolometer technology that can obtain high speed and sensitivity, low-power operation, and cost-effectiveness. We demonstrate nano-thermoelectric LWIR bolometers with fast and high-sensitivity response to LWIR around 10 $\mu$m. These devices are based on ultra-thin silicon membranes that utilize the dimensional scaling of silicon nanomembranes in thermoelectric elements and are combined with metallic nanomembranes with subwavelength absorber structures. The fast device performance stems from a low heat capacity design where the thermoelectric beams act both as mechanical supports and transducer elements. Furthermore, by scaling down the thickness of the thermoelectric beams the thermal conductivity is reduced owing to enhanced phonon boundary scattering, resulting in increased sensitivity. The nano-thermoelectric LWIR bolometers are based on 40-nm-thick n- and p-type silicon membranes with LWIR (voltage) responsivities up to 1636 V/W and 1350 V/W and time constants in the range of 300-600 $\mu$s, resulting in specific detectivities up to $1.56\times10^8$ cmHz$^{1/2}$/W. We also investigate the use of a heavily doped N++ substrate to increase optical cavity back reflection, resulting in an increased Si substrate reflectance from 30% to 70%-75% for wavelengths between 8-10 $\mu$m, resulting in an increase in device responsivity by approximately 20%.

Wavelength and Thermal Distribution Selectable Microbolometers Based on Metamaterial Absorbers

Microwave Metamaterial Absorbers with Controllable Luminescence Features.

Terahertz Metamaterial-Based Microbolometers Fabricated by Conventional MEMS

Dual-Band Infrared Metamaterial Perfect Absorber For Narrow-Band Thermal Emitters

Diode-based Microbolometer with Performance Enhanced by Broadband Metamaterial Absorber.

A Cavity-Coupled Microbolometer Terahertz Detector with a Metamaterial Reflector

A spectrally selective visible microbolometer based on planar subwavelength thin films

Ultrafast Silicon Nanomembrane Microbolometer for Long-Wavelength Infrared Light Detection

Dual-band Perfect Absorber for a Mid-Infrared Photodetector Based on a Dielectric Metal Metasurface

Demonstration of Thermally Tunable Multi-Band and Ultra-Broadband Metamaterial Absorbers Maintaining High Efficiency during Tuning Process

Metamaterial metal-based bolometers

High Performance Optical Absorber Based on a Plasmonic Metamaterial

OPTICAL AND THERMAL DESIGN FOR MICROBOLOMETER

Wavelength-dependent near-infrared microbolometer for short-wavelength infrared light with gold nanowire grating optical absorber

Infrared Bolometers Based on 40-nm-Thick Nano-Thermoelectric Silicon Membranes

Design and performance study of a multiband metamaterial tunable thermal switching absorption device based on AlCuFe and VO 2

Microbolometers for infrared detection

Design and performance study of a multiband metamaterial tunable thermal switching absorption device based on AlCuFe and VO2

Nano-thermoelectric infrared bolometers

Decoupling absorption and radiative cooling in mid-wave infrared bolometric elements.

Design and Simulation of Microbolometer with Dual Cavity for High Figure of Merits