Abstract:State-of the-art infrared photodetectors operating in the mid- and long-wavelength infrared (MWIR and LWIR) are largely dominated by cryogenically cooled quantum sensors when the target is the highest sensitivity and detection speeds. Nano-thermoelectrics provide a route towards competitive uncooled infrared bolometer technology that can obtain high speed and sensitivity, low-power operation, and cost-effectiveness. We demonstrate nano-thermoelectric LWIR bolometers with fast and high-sensitivity response to LWIR around 10 $\mu$m. These devices are based on ultra-thin silicon membranes that utilize the dimensional scaling of silicon nanomembranes in thermoelectric elements and are combined with metallic nanomembranes with subwavelength absorber structures. The fast device performance stems from a low heat capacity design where the thermoelectric beams act both as mechanical supports and transducer elements. Furthermore, by scaling down the thickness of the thermoelectric beams the thermal conductivity is reduced owing to enhanced phonon boundary scattering, resulting in increased sensitivity. The nano-thermoelectric LWIR bolometers are based on 40-nm-thick n- and p-type silicon membranes with LWIR (voltage) responsivities up to 1636 V/W and 1350 V/W and time constants in the range of 300-600 $\mu$s, resulting in specific detectivities up to $1.56\times10^8$ cmHz$^{1/2}$/W. We also investigate the use of a heavily doped N++ substrate to increase optical cavity back reflection, resulting in an increased Si substrate reflectance from 30% to 70%-75% for wavelengths between 8-10 $\mu$m, resulting in an increase in device responsivity by approximately 20%.

Decoupling absorption and radiative cooling in mid-wave infrared bolometric elements.

Design of Athermalization for Dual-Band Infrared Optical System Based on Harmanic Diffraction

Athermal design of long-wave infrared optical system with hybrid refractive/diffractive

Atmospheric-Window-Matching Hierarchical Broadband Infrared Absorber Realized by Lithography-Free Fabrication

Design of A Panoramic Long-Wave Infrared Athermal System

Wavelength and Thermal Distribution Selectable Microbolometers Based on Metamaterial Absorbers

Wide-Range Bolometer with RF Readout TES

Ultrathin High Quality-Factor Planar Absorbers/Emitters Based on Uniaxial/Biaxial Anisotropic van der Waals Polar Crystals

Wide-Angle Spectrally Selective Absorbers and Thermal Emitters Based on Inverse Opals

Bridging the Fabry–Perot cavity and asymmetric Berreman mode for long-wave infrared nonreciprocal thermal emitters

A Dual-polarized Broadband Planar Antenna and Channelizing Filter Bank for Millimeter Wavelengths

Fabrication of phononic filter structures for far-IR/sub-mm detector applications

Hybrid optical-thermal devices and materials for light manipulation and radiative cooling

Nano-thermoelectric infrared bolometers

Performance of cryogenic microbolometers and calorimeters with on-chip coolers

Design and Simulation of Microbolometer with Dual Cavity for High Figure of Merits

Multi-resonance coupled metal pattern metamaterial for selective thermal emission

Infrared Bolometers Based on 40-nm-Thick Nano-Thermoelectric Silicon Membranes

High-sensitivity transition-edge-sensed bolometers: improved speed and characterization with AC and DC bias

Dual-Band Infrared Metamaterial Perfect Absorber For Narrow-Band Thermal Emitters

Wavelength-by-Wavelength Temperature-Independent Thermal Radiation Utilizing an Insulator–Metal Transition