Abstract:The rapid advancement of micro-nano machining technology has led to a decrease in the dimensions of microdevices and microchips, following the principles of Moore's law. In addition to conventional semiconductor materials like silicon, emerging nanoscale materials such as nanowires, nanotubes, and two-dimensional materials are being considered as promising alternative constituent materials. The mechanical properties of these materials have a significant impact on the performance and service life of these microdevices and microchips. However, conventional mechanical testing methods have difficulty in accurately measuring the properties of these materials at the nanoscale due to limitations in displacement control and microforce sensing. Consequently, there is an urgent need to develop a micromechanical device capable of testing nanoscale solid materials. In this study, we propose a concept based on high-resolution image sequences for the design of an integrated micromechanical device capable of synchronously measuring the force and deformation of tested specimens. The device has been fabricated using ultrafast femtosecond laser etching technology, which offers an efficient and cost-effective approach for manufacturing microstructures and is suitable for processing various materials such as metals and nonmetals. The stiffness of the device plays a crucial role in the design of the micromechanical device, and a stiffness-matching criterion is introduced to ensure appropriate design parameters. The fabricated device is employed to conduct in-situ tension experiments on SiC nanowires and multilayer molybdenum disulfide nanosheet within a scanning electronic microscope, enabling accurate measurement of their strength, modulus, and fracture strain.

Role of phase transformation in possible wear mechanisms in silicon microelectromechanical-system devices

Wear Behaviour and Microstructural Changes of SiCw-Al Composite under Unlubricated Sliding Friction

Characteristics of the Wear Process of Side-Wall Surfaces in Bulk-Fabricated Si-MEMS Devices in Nitrogen Gas Environment

Atomic Insight into Tribochemical Wear Mechanism of Silicon at the Si/SiO2 Interface in Aqueous Environment: Molecular Dynamics Simulations Using ReaxFF Reactive Force Field

Effect of Surface Energy on the Wear Process of Bulk-Fabricated Mems Devices

Experimental Investigation of Tip Wear of AFM Monocrystalline Silicon Probes

Correlation between serum lipids and 1-hour postload plasma glucose levels in normoglycemic individuals.

AFM Tip-Based Fabrication of Silicon Nanostructures with Reduced Subsurface Amorphous Layers

From atomic attrition to mild wear at multi-asperity interfaces: The wear of hard Si3N4 repeatedly contacted against soft Si

Role of mechanically-driven distorted microstructure in mechanochemical removal of silicon

Nanoscale Wear Triggered by Stress-Driven Electron Transfer

Friction and Wear Properties of Microstructures in MEMS

Phase Field Simulations on Domain Switching-Induced Toughening or Weakening in Multiferroic Composites

An on-chip micro-friction tester for tribology research of silicon based MEMS devices

Adhesive and Corrosive Wear at Microscales in Different Vapor Environments

A Single Crystal Silicon Based Micro-tribotester and Testing

Wear phenomena in chemical mechanical polishing

Size Dependence of Nanoscale Wear of Silicon Carbide

On-chip testing method for measurements of friction and wear in moveable MEMS devices

An integrated push-to-pull micromechanical device: Design, fabrication, and in-situ experiment