Abstract:Modern aviation components have higher requirements for high temperature resistance, high strength and lightweight materials, and ceramic matrix composites have superior overall performance. However, its high brittleness and anisotropy lead to a challenge for manufacturing. In order to understand the formation conditions and the evolution of surface microstructures of the Cf/SiC microgrooves processed by ultrafast laser comprehensively, we designed a single-factor experiment and performed sensitivity analysis. The experiment results showed that the pulse energy had great effects on the depth of the microgroove, and the intense ablation caused more active oxidation of SiC to occur, generating more SiO(g). However, too much pulse energy may cause the material removal mechanism to be more due to the photothermal effect rather than the plasma effect. Low repetition frequency caused a large number of laminated connections in the microgroove and the oxide gradually changed from lumpy to flocculent as the repetition frequency increased. The more scanning times, the more ablation products sputtered onto the sample surface, including unablated carbon fibers. Shallow depth and ablation residues remained in the microgroove occurred under few scanning times. Although too fast scanning speed leaded to a rapid decrease in the microgroove depth, too slow scanning speed also generated more unablated carbon fibers sputtering out of the microgrooves. The microgroove depth had the highest sensitivity to the repetition frequency, followed by the pulse energy and scanning speed. The pulse energy and scanning speed had a greater effect on the oxide layer height, the repetition frequency affected the oxide layer width, and the scanning speed affected the microgroove width significantly. According to the processing requirements and the hot spot map, the processing parameters that can be adjusted effectively will be able to be obtained.

Fabrication of Grooves on Polymer-Derived SiAlCN Ceramics Using Femtosecond Laser Pulses

Femtosecond Laser Pulse Ablation Characteristics of Polymer-Derived SiAlCN Ceramics

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Study on the Grooved Morphology of CMC-SiCf/SiC by Dual-Beam Coupling Nanosecond Laser

Mechanism and morphology control of underwater femtosecond laser microgrooving of silicon carbide ceramics.

Fabrication of Micro Grooves on Silicon by Micro Optical Fiber Enhanced Pulse Laser Irradiation

Femtosecond laser filament ablated grooves of SiC ceramic matrix composite and its grooving monitoring by plasma fluorescence

Laser Etching of Groove Structures with Micro-Optical Fiber-Enhanced Irradiation

Microstructure evolution and ablation mechanism of SiCf/SiC ceramic matrix composite microgrooves processed by pico-second laser

Experimental Study on Femtosecond Laser Processing Performance of Single-Crystal Silicon Carbide

Fabrication of Micro-Grooves in Silicon Carbide Using Femtosecond Laser Irradiation and Acid Etching

Micro-grooves Machining and Optimizing on SiC/SiC Composites by Femtosecond Laser-Based on Response Surface Methodology

Fabrication and Characterization of Micro-Channels on Al2O3/TiC Ceramic Produced by Nanosecond Laser

Surface microstructure evolution of Cf/SiC ceramic matrix composite microgrooves processed by ultrafast laser

Processing Microgrooves and Craters on the Surface of Wide Band Gap Mold Material Using Femtosecond Laser

Experimental Study on the Influence of Ultraviolet Laser Parameters on the Microstructure Machining Quality of Silicon Carbide Ceramic

Study on Morphology of High-Aspect-Ratio Grooves Fabricated by Using Femtosecond Laser Irradiation and Wet Etching

Laser-induced gradient microstrcutres on Si3N4 ceramics and their wettability analysis

One-step fabrication of fine surfaces via femtosecond laser on sliced SiC

Centimeter-scale low-damage micromachining on single-crystal 4H–SiC substrates using a femtosecond laser with square-shaped Flat-Top focus spots

Deep-subwavelength single grooves prepared by femtosecond laser direct writing on Si