A MEMS-based piezoelectric power generator array for vibration energy harvesting

LiuJing-Quan,FangHua-Bin,XuZheng-Yi,MaoXin-Hui,ShenXiu-Cheng,ChenDi,LiaoHang,CaiBing-Chu

IF: 1.992

2008-01-01

Microelectronics Journal

Abstract:Piezoelectric power generator made by microelectromechanical system (MEMS) technology can scavenge power from low-level ambient vibration sources. The developed MEMS power generators are featured w...

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A MEMS-based piezoelectric power generator array for vibration energy harvesting

Jing-Quan Liu,Hua-Bin Fang,Zheng-Yi Xu,Xin-Hui Mao,Xiu-Cheng Shen,Di Chen,Hang Liao,Bing-Chu Cai

DOI: https://doi.org/10.1016/j.mejo.2007.12.017

IF: 1.992

2008-01-01

Microelectronics Journal

Abstract:Piezoelectric power generator made by microelectromechanical system (MEMS) technology can scavenge power from low-level ambient vibration sources. The developed MEMS power generators are featured with fixed/narrow operation frequency and power output in microwatt level, whereas, the frequency of ambient vibration is floating in some range, and power output is insufficient. In this paper, a power generator array based on thick-film piezoelectric cantilevers is investigated to improve frequency flexibility and power output. Piezoelectric cantilevers array has been designed and fabricated. The cantilevers array can be tuned to the frequency and expanded the excited frequency bandwidth in ambient low frequency vibration. Serial connection among cantilevers of the array is investigated. The prototype generator has a measured performance of 3.98@mW effective electrical power and 3.93 DC output voltage to resistance load. This device is promising to support networks of ultra-low-power, peer-to-peer, wireless nodes.
Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting

FangHua-Bin,LiuJing-Quan,XuZheng-Yi,DongLu,WangLi,ChenDi,CaiBing-Chu,LiuYue

IF: 1.992

2006-01-01

Microelectronics Journal

Abstract:A MEMS-based energy harvesting device, micro piezoelectric power generator, is designed to convert ambient vibration energy to electrical power via piezoelectric effect. In this work, the generator...
A vibration-based MEMS piezoelectric energy harvester and power conditioning circuit

Hua Yu,Jielin Zhou,Licheng Deng,Zhiyu Wen

DOI: https://doi.org/10.3390/s140203323

2014-02-19

Abstract:This paper presents a micro-electro-mechanical system (MEMS) piezoelectric power generator array for vibration energy harvesting. A complete design flow of the vibration-based energy harvester using the finite element method (FEM) is proposed. The modal analysis is selected to calculate the resonant frequency of the harvester, and harmonic analysis is performed to investigate the influence of the geometric parameters on the output voltage. Based on simulation results, a MEMS Pb(Zr,Ti)O3 (PZT) cantilever array with an integrated large Si proof mass is designed and fabricated to improve output voltage and power. Test results show that the fabricated generator, with five cantilever beams (with unit dimensions of about 3 × 2.4 × 0.05 mm3) and an individual integrated Si mass dimension of about 8 × 12.4 × 0.5 mm3, produces a output power of 66.75 μW, or a power density of 5.19 μW∙mm-3∙g-2 with an optimal resistive load of 220 kΩ from 5 m/s2 vibration acceleration at its resonant frequency of 234.5 Hz. In view of high internal impedance characteristic of the PZT generator, an efficient autonomous power conditioning circuit, with the function of impedance matching, energy storage and voltage regulation, is then presented, finding that the efficiency of the energy storage is greatly improved and up to 64.95%. The proposed self-supplied energy generator with power conditioning circuit could provide a very promising complete power supply solution for wireless sensor node loads.
MEMS piezo cantilever for vibration energy harvesting

Xiao-ming WU,Hua-jun FANG,Jian-hui LIN,Tian-ling REN,Li-tian LIU

DOI: https://doi.org/10.3969/j.issn.1007-4252.2008.02.041

2008-01-01

Abstract:This paper introduces a MEMS device for generating electrical power from mechanical energy of environment vibration. The design utilizes a single crystal silicon beam covered with sol-gel PZT film. Its operation principal is based on the direct piezoelectric effect of PZT material. The device is fabricated on (110) silicon wafer, on which an optional cuboid silicon mass can be formed beneath the cantilever using simple wet etching process. The proof mass is helpful for the improvement of output electric power and decrease of the natural frequency of the device. Electro-machanical modeling, fabrication processes and measurement of the prototypes are presented. The test results show that the power generation of more than 1 nW at a vibration at1673Hz /11 nm has been obtained.
MODELING AND SIMULATION OF PIEZOELECTRIC MEMS ENERGY HARVESTING DEVICE

J. H. LIN,X. M. WU,T. L. REN,L. T. LIU

DOI: https://doi.org/10.1080/10584580701756649

2007-12-11

Integrated Ferroelectrics

Abstract:Piezoelectric MEMS power generator is used to harvest energy from the ambient vibrations in the environment. This paper proposes a structure design of MEMS power generator for low-frequency applications, which is based on bulk MEMS technology and (110) Si wafer. The structure consists of a silicon cantilever with a piezoelectric layer attached. The cantilever is modeled as an Euler-Bernoulli beam with a lumped mass beneath the tip of the cantilever, and then analytical modeling and simulations are carried out using MATLAB. Simulation results show that a tradeoff between the geometric parameters and the proof mass should be made for a high output power of the device. To increase the output power, the length of piezoelectric layer can be optimized, which is not necessarily equal to that of cantilever. Simulation results point out ways to perform the optimization of MEMS power generator. The analytical modeling and simulations are also helpful for the design of macro-scale power generator.

engineering, electrical & electronic,physics, condensed matter, applied
A Nail-Size Piezoelectric Energy Harvesting System Integrating a MEMS Transducer and a CMOS SSHI Circuit

Sijun Du,Yu Jia,Chun Zhao,Gehan A. J. Amaratunga,Ashwin A. Seshia

DOI: https://doi.org/10.1109/jsen.2019.2941180

IF: 4.3

2020-01-01

IEEE Sensors Journal

Abstract:Piezoelectric vibration energy harvesting has drawn much interest to power distributed wireless sensor nodes for Internet of Things (IoT) applications where ambient kinetic energy is available. For certain applications, the harvesting systemshouldbe small and able to generate sufficient output power. Standard rectification topologies such as the full-bridge rectifier are typically inefficient when adapted to power conditioning from miniaturized harvesters. Therefore, active rectification circuits have been researched to improve overall power conversion efficiency, andmeet both the output power and miniaturization requirements while employing a MEMS harvester. In this paper, a MEMS piezoelectric energy harvester is designed and co-integrated with an active synchronized switch harvesting on inductor (SSHI) rectification circuit designed in a CMOS process to achieve high output power for systemminiaturization. The system is fully integrated on a nail-size board, which is ready to provide a stable DC power for low-powermini sensors. A MEMS energy harvester of 0.005 cm(3) size, co-integratedwith the CMOS conditioning circuit, outputs a peak rectified DC power of 40.6 mu W and achieves a record DC power density of 8.12 mW/cm(3) when compared to state-of-the-art harvesters.
Fabrication and performance evaluation of a metal-based bimorph piezoelectric MEMS generator for vibration energy harvesting

Chun-Liang Kuo,Shun-Chiu Lin,Wen-Jong Wu

DOI: https://doi.org/10.1088/0964-1726/25/10/105016

IF: 4.1

2016-09-16

Smart Materials and Structures

Abstract:This paper presents the development of a bimorph microelectromechanical system (MEMS) generator for vibration energy harvesting. The bimorph generator is in cantilever beam structure formed by laminating two lead zirconate titanate thick-film layers on both sides of a stainless steel substrate. Aiming to scavenge vibration energy efficiently from the environment and transform into useful electrical energy, the two piezoelectric layers on the device can be poled for serial and parallel connections to enhance the output voltage or output current respectively. In addition, a tungsten proof mass is bonded at the tip of the device to adjust the resonance frequency. The experimental result shows superior performance the generator. At the 0.5 g base excitation acceleration level, the devices pooled for serial connection and the device poled for parallel connection possess an open-circuit output voltage of 11.6 VP–P and 20.1 VP–P, respectively. The device poled for parallel connection reaches a maximum power output of 423 μW and an output voltage of 15.2 VP–P at an excitation frequency of 143.4 Hz and an externally applied based excitation acceleration of 1.5 g, whereas the device poled serial connection achieves a maximum power output of 413 μW and an output voltage of 33.0 VP–P at an excitation frequency of 140.8 Hz and an externally applied base excitation acceleration of 1.5 g. To demonstrate the feasibility of the MEMS generator for real applications, we finished the demonstration of a self-powered Bluetooth low energy wireless temperature sensor sending readings to a smartphone with only the power from the MEMS generator harvesting from vibration.

materials science, multidisciplinary,instruments & instrumentation
Piezoelectric MEMS Energy Harvester for Low-Power Applications

George Muscalu,Bogdan Firtat,Adrian Anghelescu,Carmen Moldovan,Silviu Dinulescu,Costin Brasoveanu,Magdalena Ekwinska,Dariusz Szmigiel,Michal Zaborowski,Jerzy Zajac,Ion Stan,Adrian Tulbure

DOI: https://doi.org/10.3390/electronics13112087

IF: 2.9

2024-05-28

Electronics

Abstract:With the global market value of sensors on the rise, this paper focuses on the fabrication and testing of a proof-of-concept piezoelectric energy harvester which is able to harvest mechanical energy from the ambient environment and convert it into electrical energy in order to power wireless sensor networks. We focused on obtaining a new device structure based on a comb-type array of piezoelectric MEMS cantilevers (2 × 10) for a resonant frequency in the environmental application domain (a few hundred Hz) and a chip area of only 1 cm2. The configuration of the lead-free piezoelectric cantilever consists of a Si substrate, a pair of Ti-Pt electrodes and a sputtered piezoelectric layer of 12% Sc-doped AlN with a thickness of 1000 nm, a dielectric constant of ~13 and e31,f = 1.3 C/m2. At a resonant frequency of 465.2 Hz and an acceleration of 1 g, the maximum value for the collected power was 2.53 μW for an optimal load resistance of 1 MΩ resulting in a power density of 60.2 nW/mm3 for the unpacked device, without taking into account the vibration volume. By increasing the excitation acceleration to 2 g RMS and using LTC3588-1 for the power circuitry we were able to obtain a stabilized output voltage of 1.8 V.

engineering, electrical & electronic,physics, applied,computer science, information systems
A MEMS Piezoelectric Cantilever Beam Array for Vibration Energy Harvesting

Xingqiang Zhao,Zhiyu Wen,Licheng Deng,Guoxi Luo,Zhengguo Shang,Dongling Li

DOI: https://doi.org/10.4028/www.scientific.net/kem.562-565.1052

2013-01-01

Key Engineering Materials

Abstract:A micro piezoelectric cantilever beam array is designed for vibration energy harvesting. A single degree of freedom analytical model is developed to predict the properties of the device and is verified by finite element method. The piezoelectric material Aluminum Nitride was chosen for the compatibility with the CMOS process. The devices consisting of 5 piezoelectric cantilever beams and one proof mass were fabricated using micromachining technology. The resonance frequency, voltage and power were tested at excitation acceleration of 5.0 g. The maximum output power of the device is 9.13 μW at the resonance frequency of 1315 Hz when piezoelectric beams are connected in parallel.
Vibration energy harvesting using a piezoelectric circular diaphragm array

Wei Wang,Tongqing Yang,Xurui Chen,Xi Yao

DOI: https://doi.org/10.1109/TUFFC.2012.2422

2012-01-01

Abstract:This paper presents a method for harvesting electric energy from mechanical vibration using a mechanically excited piezoelectric circular membrane array. The piezoelectric circular diaphragm array consists of four plates with series and parallel connection, and the electrical characteristics of the array are examined under dynamic conditions. With an optimal load resistor of 160 kω, an output powe...
Trends of MEMS-Based Piezoelectric Vibration Energy Harvesters

Sun Jian,Li Yigui,Liu Jingquan,Yang Chunsheng,He Dannong

DOI: https://doi.org/10.3969/j.issn.1671-4776.2009.11.007

2009-01-01

Abstract:The working principle and physical model of MEMS-based piezoelectric vibration energy harvesters (MPVEHs) are described.According to different structures of piezoelectric components,MPVEHs can be divided into four types which are single linear cantilever structure,linear cantilever array,L-shape beam-mass structure and circular piezoelectric diaphragm structure.Advantages and disadvantages of different MPVEHs are discussed.The structure parameters and performance of the MPVEHs made by research teams at home and abroad are introduced in detail.The achievements and applications of MPVEHs are pointed out,and the problems in the current research are analyzed.If great progress in analysis and modeling,structures and piezoelectric materials can be made,MPVEHs as novel energy equipments will have a promise future in MEMS systems and low-power wireless sensor networks.
Piezoelectric MEMS Low-Level Vibration Energy Harvester with PMN-PT Single Crystal Cantilever

G. Tang,J-Q. Liu,B. Yang,J-B. Luo,H-S. Liu,Y-G. Li,C-S. Yang,V-D. Dao,K. Tanaka,S. Sugiyama

DOI: https://doi.org/10.1049/el.2012.1419

2012-01-01

Electronics Letters

Abstract:A piezoelectric MEMS vibration energy harvester with PMN-PT single material has been developed, which can convert low-level vibration energy into electrical energy. Compared with the conventional piezoelectric material, the PMN-PT single crystal has a higher coupling coefficient and electromechanical coefficient, which can improve the conversion efficiency of the power generating device. The designed device consists of a composite cantilever beam and an Ni proof mass, which is fabricated using UV-LIGA technology. Test results show that the fabricated vibration energy harvester can generate a maximum output power of 2.704 mu W with a 2.08 VP-P output voltage, at a resonant frequency of 237.4 Hz and 1.0g acceleration level.
Fabrication and performance of piezoelectric MEMS generators using bulk PZT films

Gang Tang,Jingquan Liu,Hesheng Liu,Yi Li,Chunsheng Yang,Dannong He

DOI: https://doi.org/10.4028/www.scientific.net/KEM.483.607

2011-01-01

Key Engineering Materials

Abstract:In this paper, a MEMS-based piezoelectric energy harvester is studied and the whole fabrication process is discussed. The generator structure of composite cantilever with nickel metal mass is devised. MEMS related techniques such as UV-LIGA, ion etching, XeF2 dry etching, wet chemical etching are developed to fabricate the device. This key process includes the bonding a bulk PZT to a Si wafer, and thinning the PZT down to about 15 mu m in thickness after bonding by mechanical lapping and polishing method. Epoxy resin with a thickness of about 4 mu m is used as the intermediate adhesive layer. The formed generator is measured on vibration testing setup. The energy under the first resonant mode can be harvested, corresponding to the resonant frequency of 810 Hz. The maximum output voltage under the resonant operation is about 1.23V(p-p).
A Micro Electromagnetic Low Level Vibration Energy Harvester Based on MEMS Technology

Peihong Wang,Katsuhiko Tanaka,Susumu Sugiyama,Xuhan Dai,Xiaolin Zhao,Jingquan Liu

DOI: https://doi.org/10.1007/s00542-009-0827-0

2009-01-01

Microsystem Technologies

Abstract:This paper presents a micro electromagnetic energy harvester which can convert low level vibration energy to electrical power. It mainly consists of an electroplated copper planar spring, a permanent magnet and a copper planar coil with high aspect ratio. Mechanical simulation shows that the natural frequency of the magnet-spring system is 94.5 Hz. The resonant vibration amplitude of the magnet is 259.1 μm when the input vibration amplitude is 14 μm and the magnet-spring system is at resonance. Electromagnetic simulation shows that the linewidth and the turns of the coil influence the induced voltage greatly. The optimized electromagnetic vibration energy harvester can generate 0.7 μW of maximal output power with peak–peak voltage of 42.6 mV in an input vibration frequency of 94.5 Hz and input acceleration of 4.94 m/s2 (this vibration is a kind of low level ambient vibration). A prototype (not optimized) has been fabricated using MEMS micromachining technology. The testing results show that the prototype can generate induced voltage (peak–peak) of 18 mV and output power of 0.61 μW for 14.9 m/s2 external acceleration at its resonant frequency of 55 Hz (this vibration is not in a low ambient vibration level).
Design Of A Hybrid Piezoelectric-Electromagnetic Vibration Power Generator

Hongyun Lin,Po-Lin Hsu,Tao Chen,Huicong Liu,Haibo Huang,Lining Sun,Lijuan Cui

DOI: https://doi.org/10.1109/NANO.2016.7751483

2016-01-01

Abstract:This paper presents a hybrid vibration power generator based on piezoelectric and electromagnetic mechanisms. The hybrid power generator is composed of a 36 mm*17 mm*0.73 mm piezoelectric cantilever and a 40 mm long electromagnetic tube. Such combination allows the generator to produce high power output using both piezoelectric effect and electromagnetic induction under low-frequency vibrations. The hybrid generator was capable of producing higher power output (2.173 mW at 25 Hz of 1 g) compared to conventional designs of the same dimensions. The proposed hybrid generator holds a potential in applications such as self-powered microelectronics and wireless sensor nodes.
A review of vibration-based MEMS piezoelectric energy harvesters

Salem Saadon,Othman Sidek

DOI: https://doi.org/10.1016/j.enconman.2010.07.024

IF: 10.4

2011-01-01

Energy Conversion and Management

Abstract:The simplicity associated with the piezoelectric micro-generators makes it very attractive for MEMS applications, especially for remote systems. In this paper we reviewed the work carried out by researchers during the last three years. The improvements in experimental results obtained in the vibration-based MEMS piezoelectric energy harvesters show very good scope for MEMS piezoelectric harvesters in the field of power MEMS in the near future.

energy & fuels,thermodynamics,mechanics
Piezoelectric Mems Generator Based on the Bulk Pzt/Silicon Wafer Bonding Technique

Gang Tang,Jing-quan Liu,He-sheng Liu,Yi-gui Li,Chun-sheng Yang,Dan-nong He,Viet DzungDao,Katsuhiko Tanaka,Susumu Sugiyama

DOI: https://doi.org/10.1002/pssa.201127186

2011-01-01

Abstract:A MEMS-based piezoelectric energy harvester was fabricated by bonding a piezoelectric ceramic Pb (Zr,Ti)O3 (PZT) plate to silicon wafer. The generator structure of a trapezoidal shape composite cantilever beam with nickel metal mass was designed. The novel fabrication techniques to obtain PZT thick film with excellent piezoelectric properties, including a low-temperature PZTSi bonding using epoxy resin as the intermediate adhesive layer and thinning of the bulk PZT ceramics by mechanical lapping and polishing method, were carried out. A piezoelectric MEMS power generator array was successfully fabricated and the measurement results for a microgenerator with typical dimension were also presented. The test result shows that this novel technique has great potential to fabricate high-performance piezoelectric MEMS energy harvester.
Design, fabrication and performance of a new vibration-based electromagnetic micro power generator

WangPei-Hong,DaiXu-Han,FangDong-Ming,ZhaoXiao-Lin

IF: 1.992

2007-01-01

Microelectronics Journal

Abstract:This paper presents a new vibration-based electromagnetic micro power generator fabricated using microelectromechanical systems (MEMS) technology, which can convert ambient vibration energy into el...
Vibration Energy Conversion Power Supply Based on the Piezoelectric Thin Film Planar Array

Bo Wang,Dun Lan,Fanyang Zeng,Wei Li

DOI: https://doi.org/10.3390/s22218506

IF: 3.9

2022-11-05

Sensors

Abstract:Vibration energy harvesting has received much attention as a new type of power solution for low-power micro/nano-devices. However, VEH (vibration energy harvester) based on PVDF (polyvinylidene fluoride) piezoelectric materials have a low output power and energy conversation efficiency due to the relatively low piezoelectric constant, coupling coefficient, and dielectric constant. For this reason, we design a vibration energy conversion power supply, which consists of a VEH with a PVDF piezoelectric thin film planar array vibration structure and an energy harvesting circuit for regulating the electric energy of multiple sources. Furthermore, our solution was validated by simulations of structural dynamics in COMSOL and equivalent circuits model in Multisim. From the circuitry simulation results, the output current and the charging period increase and decrease, doubling, respectively, for each doubling of the number of array groups of films. Moreover, the solid mechanics simulation results show that the planar array structure makes the phase and amplitude of the input vibration waves as consistent as possible so that the same theoretical enhancement effect of the circuitry model is achieved. An identical experimental test was implemented with vibration conditions of 75 Hz-2.198 g. The fabricated harvester quickly charged the 22 V-0.022 F ultracapacitor bank to 5 V in 24 min. The maximum open circuit voltage and output power, respectively, were 10.4 V and 0.304 mW. This maximum charging power was 11.69 times higher than that of a single film. This special power supply can replace batteries to power low-power electronics deployed in vibrating environments, thus reducing the maintenance costs of equipment and environmental pollution rates.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation

A MEMS-based piezoelectric power generator array for vibration energy harvesting

A MEMS-based piezoelectric power generator array for vibration energy harvesting

Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting

A vibration-based MEMS piezoelectric energy harvester and power conditioning circuit

MEMS piezo cantilever for vibration energy harvesting

MODELING AND SIMULATION OF PIEZOELECTRIC MEMS ENERGY HARVESTING DEVICE

A Nail-Size Piezoelectric Energy Harvesting System Integrating a MEMS Transducer and a CMOS SSHI Circuit

Fabrication and performance evaluation of a metal-based bimorph piezoelectric MEMS generator for vibration energy harvesting

Piezoelectric MEMS Energy Harvester for Low-Power Applications

A MEMS Piezoelectric Cantilever Beam Array for Vibration Energy Harvesting

Vibration energy harvesting using a piezoelectric circular diaphragm array

Trends of MEMS-Based Piezoelectric Vibration Energy Harvesters

Piezoelectric MEMS Low-Level Vibration Energy Harvester with PMN-PT Single Crystal Cantilever

Fabrication and performance of piezoelectric MEMS generators using bulk PZT films

A Micro Electromagnetic Low Level Vibration Energy Harvester Based on MEMS Technology

Design Of A Hybrid Piezoelectric-Electromagnetic Vibration Power Generator

A review of vibration-based MEMS piezoelectric energy harvesters

Piezoelectric Mems Generator Based on the Bulk Pzt/Silicon Wafer Bonding Technique

Design, fabrication and performance of a new vibration-based electromagnetic micro power generator

Vibration Energy Conversion Power Supply Based on the Piezoelectric Thin Film Planar Array