Piezoelectric MEMS Energy Harvester for Low-Power Applications

George Muscalu,Bogdan Firtat,Adrian Anghelescu,Carmen Moldovan,Silviu Dinulescu,Costin Brasoveanu,Magdalena Ekwinska,Dariusz Szmigiel,Michal Zaborowski,Jerzy Zajac,Ion Stan,Adrian Tulbure

DOI: https://doi.org/10.3390/electronics13112087

IF: 2.9

2024-05-28

Electronics

Abstract:With the global market value of sensors on the rise, this paper focuses on the fabrication and testing of a proof-of-concept piezoelectric energy harvester which is able to harvest mechanical energy from the ambient environment and convert it into electrical energy in order to power wireless sensor networks. We focused on obtaining a new device structure based on a comb-type array of piezoelectric MEMS cantilevers (2 × 10) for a resonant frequency in the environmental application domain (a few hundred Hz) and a chip area of only 1 cm2. The configuration of the lead-free piezoelectric cantilever consists of a Si substrate, a pair of Ti-Pt electrodes and a sputtered piezoelectric layer of 12% Sc-doped AlN with a thickness of 1000 nm, a dielectric constant of ~13 and e31,f = 1.3 C/m2. At a resonant frequency of 465.2 Hz and an acceleration of 1 g, the maximum value for the collected power was 2.53 μW for an optimal load resistance of 1 MΩ resulting in a power density of 60.2 nW/mm3 for the unpacked device, without taking into account the vibration volume. By increasing the excitation acceleration to 2 g RMS and using LTC3588-1 for the power circuitry we were able to obtain a stabilized output voltage of 1.8 V.

engineering, electrical & electronic,physics, applied,computer science, information systems

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to develop a piezoelectric MEMS energy harvester that can collect energy from ambient mechanical vibrations and convert it into electrical energy for use in wireless sensor networks with low power requirements. Specifically, the research aims to design and fabricate a new device structure based on lead - free piezoelectric materials (such as 12% scandium - doped aluminum nitride, Sc - doped AlN), which contains a comb - arrayed piezoelectric MEMS cantilever beam (2×10) with a resonant frequency in the field of ambient applications (several hundred hertz) and a chip area of only 1 square centimeter. Through this design, researchers hope to increase the output power density of the energy harvester while reducing dependence on polluting energy sources such as batteries, thereby achieving a more sustainable energy supply solution.