Design, fabrication and performance of a new vibration-based electromagnetic micro power generator

WangPei-Hong,DaiXu-Han,FangDong-Ming,ZhaoXiao-Lin

IF: 1.992

2007-01-01

Microelectronics Journal

Abstract:This paper presents a new vibration-based electromagnetic micro power generator fabricated using microelectromechanical systems (MEMS) technology, which can convert ambient vibration energy into el...

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Design, fabrication and performance of a new vibration-based electromagnetic micro power generator

Pei-Hong Wang,Xu-Han Dai,Dong-Ming Fang,Xiao-Lin Zhao

DOI: https://doi.org/10.1016/j.mejo.2007.10.002

IF: 1.992

2007-01-01

Microelectronics Journal

Abstract:This paper presents a new vibration-based electromagnetic micro power generator fabricated using microelectromechanical systems (MEMS) technology, which can convert ambient vibration energy into electric power. The microgenerator consists of a permanent magnet of NdFeB, a copper planar spring and a two-layer copper coil. ANSYS modal analysis was used to predict the resonant frequencies and resonant vibration modes of the spring-mass system. The detailed fabrication processes of the microgenerator are given. Experimental results show that the prototype microgenerator can generate open-circuit voltage of 60mV ac peak-peak with 121.25Hz input frequency and the acceleration of 1.5g (g=9.8m/s^2). The experimental and simulated results were compared and discussed.
Design Optimization of Microfabricated Coils for Volume-Limited Miniaturized Broadband Electromagnetic Vibration Energy Harvester

Shuyu Fan,Yongkui Tang,Lurui Zhao,Hai Liu,Yufeng Wang,Dibo Hou,Yunqi Cao

DOI: https://doi.org/10.1016/j.enconman.2022.116299

IF: 10.4

2022-01-01

Energy Conversion and Management

Abstract:Broadband electromagnetic vibration energy harvesters (EMVEHs) can effectively convert mechanical energy into electricity from human motions with low and random frequencies. However, such applications require a small device footprint which limits the power density of the energy harvester, making it hard to generate sufficient energy for wearable electronics. Here, we present a design of a nonresonant broadband EMVEH based on a magnet array with alternating magnetic polarities and microfabricated planar coils. To enhance the power output and power density of the EMVEH, we propose a geometric optimization method for determining the coil geometry. First, the magnetic flux density (MFD) distribution and the power output under different types of excitation motions are studied by finite element analysis and numerical simulation, respectively. Based on these results, a design of a stackable microfabricated double-sided planar coil sheet consisting of 10 coil groups is chosen. Through the optimization based on the trade-off between induced voltage and coil resistance, four coil turns in each coil group is determined as the optimal design for maximizing the output power, which proved independent of the excitation conditions. Based on the optimized design, a prototype consisting of 20 layers of coil sheets connected in series on each side is fabricated, occupying only 1.73 cm3. The device is tested to have a wide half-power bandwidth of 8 Hz, a maximum output power of 346.7 mu W, and a maximum power density of 200.4 mu W/cm3 , when connected to a matched load of 69.46 omega under sinusoidal excitations of 2.0 g acceleration. Furthermore, we propose a preliminary optimization methodology to determine the optimal number of stacked coil layers.
Design,fabrication and Performance Test of a Micromachined Permanent Magnet Vibration-Based Power Generator

WANG Pei-hong,ZHAO Xiao-lin,DAI Xu-han,WANG Zhong-zhu

DOI: https://doi.org/10.3969/j.issn.1672-2892.2011.01.022

2011-01-01

Abstract:This paper presents a permanent magnet vibration-based power generator based on Micro Electro Mechanical Systems(MEMS) technology.It can scavenge vibration energy and convert it into electrical power.It includes a fixed micro coil and a movable permanent magnet attached on a nickel planar spring integrated with silicon frame.The two-layer copper micro coil and nickel planar spring on silicon are fabricated using bulk-silicon micromachining and microelectroplating technique.Two prototypes with different coils and same magnet-spring system are assembled and tested.Prototype A can generate maximal load voltage of 51 mV and load power of 5.89 μW at 222 Hz resonant frequency and 9.8 m/s2 acceleration.At the resonant frequency of 247 Hz,prototype B generates maximum load voltage of 62 mV and load power of 6.4 μW for acceleration of 9.8 m/s2.The coil's area of 6.25 mm2 in prototype B is only 28% of that of 22.56 mm2 in prototype A,however,the load voltage and load power are increased by 21.6% and 8.6%,respectively.The analysis about the difference of output performance of two prototypes is also given in this paper.
Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting

FangHua-Bin,LiuJing-Quan,XuZheng-Yi,DongLu,WangLi,ChenDi,CaiBing-Chu,LiuYue

IF: 1.992

2006-01-01

Microelectronics Journal

Abstract:A MEMS-based energy harvesting device, micro piezoelectric power generator, is designed to convert ambient vibration energy to electrical power via piezoelectric effect. In this work, the generator...
Design and Fabrication of A Micro Electromagnetic Vibration Energy Harvester

Wang Peng,Li Wei,Che Lufeng

DOI: https://doi.org/10.1088/1674-4926/32/10/104009

2011-01-01

Abstract:This paper presents a new micro electromagnetic energy harvester that can convert transverse vibration energy to electrical power. It mainly consists of folded beams, a permanent magnet and copper planar coils. The calculated value of the natural frequency is 274 Hz and electromagnetic simulation shows that the magnetic flux density will decrease sharply with increasing space between the magnet and coils. A prototype has been fabricated using MEMS micromachining technology. The testing results show that at the resonant frequency of 242 Hz, the prototype can generate 0.55 μW of maximal output power with peak-peak voltage of 28 mV for 0.5g (g = 9.8 m/s2) external acceleration.
Design and Experimental Characterization of a Tunable Vibration-Based Electromagnetic Micro-Generator

Dibin Zhu,Stephen Roberts,Michael J. Tudor,Stephen P. Beeby

DOI: https://doi.org/10.1016/j.sna.2010.01.002

2010-01-01

Abstract:Vibration-based micro-generators, as an alternative source of energy, have become increasingly significant in the last decade. This paper presents a new tunable electromagnetic vibration-based micro-generator. Frequency tuning is realized by applying an axial tensile force to the micro-generator. The dimensions of the generator, especially the dimensions of the coil and the air gap between magnets, have been optimized to maximize the output voltage and power of the micro-generator. The resonant frequency has been successfully tuned from 67.6 to 98 Hz when various axial tensile forces were applied unable icro-generator lectromagnetic ibration energy harvesting to the structure. The generator produced a power of 61.6–156.6 W over the tuning range when excited at vibrations of 0.59 m s−2. The tuning mechanism has little effect on the total damping. When the tuning force applied on the generator becomes larger than the generator’s inertial force, the total damping increases resulting in reduced output power. The resonant frequency increases less than indicated from simulation and approaches that of a straight tensioned cable when the force associated with the tension in the beam becomes much greater than the beam stiffness. The test results agree with the theoretical analysis presented.
Model and Experimental Study of Permanent Magnet Vibration-to-Electrical Power Generator

Zhihua Wang,Bowen Wang,Minwei Wang,Huijuan Zhang,Weiping Huang

DOI: https://doi.org/10.1109/tasc.2010.2040072

IF: 1.9489

2010-01-01

IEEE Transactions on Applied Superconductivity

Abstract:The vibration energy exists widely and is always wasted. Energy harvesting devices that convert kinetic energy into electrical energy have attracted much interest. A variety of vibration driven generators using electromagnetic principles to convert the kinetic energy into electrical energy, are being studied for powering sensors. However, the power supply is always a bottleneck problem to the development of handheld electronic equipments and some other low power electrical apparatus. In this paper, the vibration-to-electrical power generator has been designed and its magnetic field distribution has been analyzed by using Finite Element method (FEM). Then, the input-output model of the generator is built on the basis of vibration equation and law of electromagnetic induction. The calculation result has shown that output voltage of the generator depends on the amplitude, frequency and waveform of a vibration source. A generator prototype has been fabricated and tested at open-circuit and different loads, such as resistances, inductances and capacitances. The comparison of experimental result with calculating one has shown that the model can describe the input-output relation of the vibration-to-electrical power generator.
Energy Scavenging From Low Frequency Vibrations Through a Multi-Pole Thin Magnet and a High-Aspect-Ratio Array Coil

Dong Han,Tadahiko Shinshi,Makoto Kine

DOI: https://doi.org/10.1007/s40684-020-00276-6

2020-12-02

Abstract:The challenges of developing a micro electromagnetic power generator are to increase the flux density from the thin permanent magnet and reduce the resistance of the micro high-winding-density coil. To overcome these challenges, we propose a novel MEMS power generator for low-frequency-vibration energy harvesting employing a 16-poles thin magnet plate and a high-aspect-ratio spiral micro array coil. Transient magnetic analysis has proved that the multi-pole magnet thin plate (8.9 × 8.9 × t0.5 mm) magnetized by laser assisted heating helps increase the output power from the generator compared with the unidirectional one. The high-aspect-ratio spiral micro array coil (width: 80 µm, thickness: 160 µm, total turns: 144) fabricated by the combination of multilayer SU-8 micro moldings, copper plating, and silver paste screen printing is beneficial for increasing coil density and reducing resistance, thus improving output power. The vibration experiment showed that in terms of no consideration of spring and guideway structure, when the magnet is directly vibrated by an actuator, the induced voltage, generated power, and power density were 1.63 mV, 0.12 µW and 1.03 µW/cm3, respectively at an excitation frequency of 10 Hz with an amplitude of 2 mm. When a 3D-printed cantilever beam was adopted as the spring and guideway structure for the resonant prototype, the counterparts were 8.48 mV, 3.34 µW and 5.22 µW/cm3, respectively at 38 Hz and 2 mm excitation (corresponding to a vibration acceleration peak of 11.6 g).

engineering, mechanical, manufacturing,green & sustainable science & technology
A Micro Electromagnetic Low Level Vibration Energy Harvester Based on MEMS Technology

Peihong Wang,Katsuhiko Tanaka,Susumu Sugiyama,Xuhan Dai,Xiaolin Zhao,Jingquan Liu

DOI: https://doi.org/10.1007/s00542-009-0827-0

2009-01-01

Microsystem Technologies

Abstract:This paper presents a micro electromagnetic energy harvester which can convert low level vibration energy to electrical power. It mainly consists of an electroplated copper planar spring, a permanent magnet and a copper planar coil with high aspect ratio. Mechanical simulation shows that the natural frequency of the magnet-spring system is 94.5 Hz. The resonant vibration amplitude of the magnet is 259.1 μm when the input vibration amplitude is 14 μm and the magnet-spring system is at resonance. Electromagnetic simulation shows that the linewidth and the turns of the coil influence the induced voltage greatly. The optimized electromagnetic vibration energy harvester can generate 0.7 μW of maximal output power with peak–peak voltage of 42.6 mV in an input vibration frequency of 94.5 Hz and input acceleration of 4.94 m/s2 (this vibration is a kind of low level ambient vibration). A prototype (not optimized) has been fabricated using MEMS micromachining technology. The testing results show that the prototype can generate induced voltage (peak–peak) of 18 mV and output power of 0.61 μW for 14.9 m/s2 external acceleration at its resonant frequency of 55 Hz (this vibration is not in a low ambient vibration level).
A MEMS-based piezoelectric power generator array for vibration energy harvesting

LiuJing-Quan,FangHua-Bin,XuZheng-Yi,MaoXin-Hui,ShenXiu-Cheng,ChenDi,LiaoHang,CaiBing-Chu

IF: 1.992

2008-01-01

Microelectronics Journal

Abstract:Piezoelectric power generator made by microelectromechanical system (MEMS) technology can scavenge power from low-level ambient vibration sources. The developed MEMS power generators are featured w...
Design Of A Hybrid Piezoelectric-Electromagnetic Vibration Power Generator

Hongyun Lin,Po-Lin Hsu,Tao Chen,Huicong Liu,Haibo Huang,Lining Sun,Lijuan Cui

DOI: https://doi.org/10.1109/NANO.2016.7751483

2016-01-01

Abstract:This paper presents a hybrid vibration power generator based on piezoelectric and electromagnetic mechanisms. The hybrid power generator is composed of a 36 mm*17 mm*0.73 mm piezoelectric cantilever and a 40 mm long electromagnetic tube. Such combination allows the generator to produce high power output using both piezoelectric effect and electromagnetic induction under low-frequency vibrations. The hybrid generator was capable of producing higher power output (2.173 mW at 25 Hz of 1 g) compared to conventional designs of the same dimensions. The proposed hybrid generator holds a potential in applications such as self-powered microelectronics and wireless sensor nodes.
Fabrication and performance evaluation of a metal-based bimorph piezoelectric MEMS generator for vibration energy harvesting

Chun-Liang Kuo,Shun-Chiu Lin,Wen-Jong Wu

DOI: https://doi.org/10.1088/0964-1726/25/10/105016

IF: 4.1

2016-09-16

Smart Materials and Structures

Abstract:This paper presents the development of a bimorph microelectromechanical system (MEMS) generator for vibration energy harvesting. The bimorph generator is in cantilever beam structure formed by laminating two lead zirconate titanate thick-film layers on both sides of a stainless steel substrate. Aiming to scavenge vibration energy efficiently from the environment and transform into useful electrical energy, the two piezoelectric layers on the device can be poled for serial and parallel connections to enhance the output voltage or output current respectively. In addition, a tungsten proof mass is bonded at the tip of the device to adjust the resonance frequency. The experimental result shows superior performance the generator. At the 0.5 g base excitation acceleration level, the devices pooled for serial connection and the device poled for parallel connection possess an open-circuit output voltage of 11.6 VP–P and 20.1 VP–P, respectively. The device poled for parallel connection reaches a maximum power output of 423 μW and an output voltage of 15.2 VP–P at an excitation frequency of 143.4 Hz and an externally applied based excitation acceleration of 1.5 g, whereas the device poled serial connection achieves a maximum power output of 413 μW and an output voltage of 33.0 VP–P at an excitation frequency of 140.8 Hz and an externally applied base excitation acceleration of 1.5 g. To demonstrate the feasibility of the MEMS generator for real applications, we finished the demonstration of a self-powered Bluetooth low energy wireless temperature sensor sending readings to a smartphone with only the power from the MEMS generator harvesting from vibration.

materials science, multidisciplinary,instruments & instrumentation
A Microelectroplated Magnetic Vibration Energy Scavenger for Wireless Sensor Microsystems

Peihong Wang,Xuhan Dai,Xiaodan Miao,Xiao-Lin Zhao,Jingquan Liu

DOI: https://doi.org/10.1109/nems.2010.5592247

2010-01-01

Abstract:This paper presents a microelectroplated magnetic vibration energy scavenger based on microelectromechanical systems (MEMS) technology. It can scavenge low level vibration energy and convert it into electrical power. It includes a fixed micro coil and a movable permanent magnet attached on a nickel planar spring integrated with silicon frame. The two-layer copper micro coil and nickel planar spring are fabricated using microelectroplating technique. Two prototypes with different coils and same magnet-spring system are assembled and tested. Prototype A can generate maximal load voltage of 51mV and load power of 5.89μW at 223.2Hz resonant frequency and 9.8m/s2 acceleration. Similarly, at the resonant frequency of 247.5Hz, prototype B generates a maximum load power of 6.4μW and a load voltage of 62mV for acceleration of 9.8m/s2. The coil's area of 6.25 mm2 in prototype B is only 28% of that of 22.56 mm2 in prototype A, however, the load voltage and load power are increased 21.6% and 8.6%, respectively. The analysis about testing results is also given in this paper.
Design and Fabrication of Acoustic Wave Actuated Microgenerator for Portable Electronic Devices

Tenghsien Lai,Changhan Huang,Chingfu Tsou

DOI: https://doi.org/10.48550/arXiv.0805.0940

2008-05-07

Abstract:The past few years have seen an increasing focus on energy harvesting issue, including power supply for portable electric devices. Utilize scavenging ambient energy from the environment could eliminate the need for batteries and increase portable device lifetimes indefinitely. In addition, through MEMS technology fabricated micro-generator could easy integrate with these small or portable devices. Several different ambient sources, including solar, vibration and temperature effect, have already exploited [1-3]. Each energy source should be used in suitable environment, therefore to produce maximum efficiency. In this paper, we present an acoustic wave actuated micro-generator for power system by using the energy of acoustic waves, such as the sound from human voices or speakerphone, to actuate a MEMS-type electromagnetic transducer. This provides a longer device lifetime and greater power system convenience. Moreover, it is convenient to integrate MEMS-based microgenerators with small or porta le devices

Other Computer Science
Performance enhancement of electromagnetic vibration energy harvesters via bi-stable structure based on MEMS 3D coils

Wensong Xiao,Hanxiao Wu,Tiantong Xu,Pin Lv,Zhi Tao,Haiwang Li,Wenbin Wang

DOI: https://doi.org/10.1063/5.0151342

IF: 4

2023-06-19

Applied Physics Letters

Abstract:In this study, we conducted a systematic exploration of a micro-electromagnetic vibration energy harvester with a bi-magnet structure and microelectromechanical systems 3D coils. First, we establish a physical model of stiffness and damping characteristics based on the superposition principle for the bi-magnet structure which has also been verified experimentally. Then, we investigate the influence of magnet gap and air gap on the stiffness and the magnetic flux change rate, mainly focusing on the distance and the potential barrier between the two potential wells. Finally, we fabricate and assemble the bi-magnet VEH prototype and tested the output performance under 1 and 6g excitation, which correspond the intra-well vibration and inter-well vibration, respectively. The tested results show that under 1g excitation, the prototype can output 155.38 μW power with 32 Hz half-power bandwidth and 4939.06 μW·Hz integrated power, which are obviously higher than those for mono-magnet under same excitation. When the excitation raises to 6g, the output power is improved to 362.98 μW with the half power bandwidth and integrated power enhanced to 56 Hz and 9289.96 μW·Hz, respectively. The tested results also prove that the structure proposed in this study can significantly enhance the output performance compared with a mono-magnet structure and other published data.

physics, applied
Design, Fabrication and Characterization of a Piezoelectric Microgenerator Including a Power Management Circuit

M. Marzencki,Y. Ammar,S. Basrour

DOI: https://doi.org/10.48550/arXiv.0802.3044

2008-02-21

Other Computer Science

Abstract:We report in this paper the design, fabrication and experimental characterization of a piezoelectric MEMS microgenerator. This device scavenges the energy of ambient mechanical vibrations characterized by frequencies in the range of 1 kHz. This component is made with Aluminum Nitride thin film deposited with a CMOS compatible process. Moreover we analyze two possible solutions for the signal rectification: a discrete doubler-rectifier and a full custom power management circuit. The ASIC developed for this application takes advantage of diodes with very low threshold voltage and therefore allows the conversion of extremely low input voltages corresponding to very weak input accelerations. The volume of the proposed generator is inferior to 1mm3 and the generated powers are in the range of 1$\mu$W. This system is intended to supply power to autonomous wireless sensor nodes.
Design and Simulation of Fully Integrated Micro Electromagnetic Vibration Energy Harvester

Tao Kai,Ding Guifu,Wang Peihong,Liu Qifa,Yang Zhuoqing

DOI: https://doi.org/10.4028/www.scientific.net/amm.152-154.1087

2012-01-01

Applied Mechanics and Materials

Abstract:A fully integrated micro electromagnetic vibration energy harvester based on MEMS technology is designed and its mechanical and electromagnetic characteristics are analyzed by using Finite Element method (FEM). Structure static, modal and harmonic analysis of spring-magnet system was carried out by ANSYS software. Ansoft Maxwell software was used to simulate the electromagnetic characteristics of the energy conversion system, especially the relationship between the output performances of the structure and parameters of the coil. The optimized model is designed and the optimization principles could provide a reference for the future electromagnetic vibration based harvester design.
Research and development of micro electret power generators

ZhaoHui Yang,Jing Wang,JinWen Zhang

DOI: https://doi.org/10.1007/s11431-011-4710-8

2012-01-01

Science China Technological Sciences

Abstract:As the size of the electronic system continuously reduces, it is very important to develop micro power generator, which has characteristics of small volume, light weight, high energy density and continuous energy supplying. Vibration energy exists widely in daily environment. Micro vibration power generator can harvest and exchange the vibration energy to the electrical energy. Micro electret power generator is one kind of the power generators for harvesting vibration energy and has been paid much attention by researchers. This paper describes the development and status of micro electret power generators, including electret materials and charging methods, vibration energy harvesting structures and conversion efficiency improvement.

Design, fabrication and performance of a new vibration-based electromagnetic micro power generator

Design, fabrication and performance of a new vibration-based electromagnetic micro power generator

Design Optimization of Microfabricated Coils for Volume-Limited Miniaturized Broadband Electromagnetic Vibration Energy Harvester

Design,fabrication and Performance Test of a Micromachined Permanent Magnet Vibration-Based Power Generator

Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting

Design and Fabrication of A Micro Electromagnetic Vibration Energy Harvester

Design and Experimental Characterization of a Tunable Vibration-Based Electromagnetic Micro-Generator

Model and Experimental Study of Permanent Magnet Vibration-to-Electrical Power Generator

Energy Scavenging From Low Frequency Vibrations Through a Multi-Pole Thin Magnet and a High-Aspect-Ratio Array Coil

A Micro Electromagnetic Low Level Vibration Energy Harvester Based on MEMS Technology

A MEMS-based piezoelectric power generator array for vibration energy harvesting

Design Of A Hybrid Piezoelectric-Electromagnetic Vibration Power Generator

Fabrication and performance evaluation of a metal-based bimorph piezoelectric MEMS generator for vibration energy harvesting

A Microelectroplated Magnetic Vibration Energy Scavenger for Wireless Sensor Microsystems

Design and Fabrication of Acoustic Wave Actuated Microgenerator for Portable Electronic Devices

Performance enhancement of electromagnetic vibration energy harvesters via bi-stable structure based on MEMS 3D coils

Design, Fabrication and Characterization of a Piezoelectric Microgenerator Including a Power Management Circuit

Design and Simulation of Fully Integrated Micro Electromagnetic Vibration Energy Harvester

Research and development of micro electret power generators