Design, fabrication and performance of a new vibration-based electromagnetic micro power generator

Pei-Hong Wang,Xu-Han Dai,Dong-Ming Fang,Xiao-Lin Zhao
DOI: https://doi.org/10.1016/j.mejo.2007.10.002
IF: 1.992
2007-01-01
Microelectronics Journal
Abstract:This paper presents a new vibration-based electromagnetic micro power generator fabricated using microelectromechanical systems (MEMS) technology, which can convert ambient vibration energy into electric power. The microgenerator consists of a permanent magnet of NdFeB, a copper planar spring and a two-layer copper coil. ANSYS modal analysis was used to predict the resonant frequencies and resonant vibration modes of the spring-mass system. The detailed fabrication processes of the microgenerator are given. Experimental results show that the prototype microgenerator can generate open-circuit voltage of 60mV ac peak-peak with 121.25Hz input frequency and the acceleration of 1.5g (g=9.8m/s^2). The experimental and simulated results were compared and discussed.
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