Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components

Xiaoshan Tong,Yulong Zhao,Xin Ma,Peng Guo,Qi Zhang,Mingjie Liu,Dongliang Zhang,Aiying Wang
DOI: https://doi.org/10.1109/SENSORS43011.2019.8956612
2019-01-01
Abstract:Amorphous carbon(a-C) is a promising material for Micro Electro-mechanical System (MEMS) due to its significant piezoresistive effect, in-situ large-area deposition and outstanding mechanical performance. In this work, a micro pressure sensor based on ultra-thin sensitive film layers (aC/Si <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> N <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> /SiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> ) is proposed. In order to measure the micro pressure change, an ultra-sensitive rectangular a-C film piezo resistor with thickness of 300 nm, width of 300 μm and length of 900 μm and an ultra-thin rectangular sensitive structure with thickness of 785 nm, width of 400 μm and length of 600 μm are designed and fabricated. The simulation and testing results show that the resistance response of the ultra-thin film, with a linear relation of differential pressure, is highly sensitive. This work shows that a-C is a potential piezoresistive material for micro pressure change detection.
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