Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors

Chih-Chung Su,Chen-Hung Li,Neng-Kai Chang,Feng Gao,Shuo-Hung Chang

DOI: https://doi.org/10.3390/s120810034

IF: 3.9

2012-01-01

Sensors

Abstract:This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe: Sn = 95: 5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.