Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range

Gang Li,Duo Chen,Chenglong Li,Wenxia Liu,Hong Liu
DOI: https://doi.org/10.1002/advs.202000154
IF: 15.1
2020-08-19
Advanced Science
Abstract:<p>Fabricating flexible pressure sensors with high sensitivity in a broad pressure range is still a challenge. Herein, a flexible pressure sensor with engineered microstructures on polydimethylsiloxane (PDMS) film is designed. The high performance of the sensor derives from its unique pyramid‐wall‐grid microstructure (PWGM). A square array of dome‐topped pyramids and crossed strengthening walls on the film forms a multiheight hierarchical microstructure. Two pieces of PWGM flexible PDMS film, stacked face‐to‐face, form a piezoresistive sensor endowed with ultrahigh sensitivity across a very broad pressure range. The sensitivity of the device is as high as 383 665.9 and 269 662.9 kPa<sup>−1</sup> in the pressure ranges 0–1.6 and 1.6–6 kPa, respectively. In the higher pressure range of 6.1–11 kPa, the sensitivity is 48 689.1 kPa<sup>−1</sup>, and even in the very high pressure range of 11–56 kPa, it stays at 1266.8 kPa<sup>−1</sup>. The pressure sensor possesses excellent bending and torsional strain detection properties, is mechanically durable, and has potential applications in wearable biosensing for healthcare. In addition, 2 × 2 and 4 × 4 sensor arrays are prepared and characterized, suggesting the possibility of manufacturing a flexible tactile sensor.</p>
materials science, multidisciplinary,nanoscience & nanotechnology,chemistry
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