Thin film capacitive micro-pressure sensors based on flexible electrode structure

Yao,Jialin,Jiang,Wugui,Shao,Na,Shi,Yunsheng,Tian,Jiading,Yang,Xing
DOI: https://doi.org/10.3969/j.issn.1004-1699.2016.07.005
2016-01-01
Abstract:A novel thin film capacitive micro-pressure sensor was designed and fabricated based on a flexible elec?trode structure. On the basis of the working principle of film capacitive pressure sensor,two kinds of designs for the capacitive micro-pressure sensor were proposed:one was based on flexible nano-films and the other was based on the flexible electrode films that with micro-structure. Meanwhile,an optimal method of the sensitivity of the pres?sure sensor was proposed to achieve a slimmer,simpler and more sensitive capacitive pressure sensor according to the structural feature of the micro-pressure sensor and the processing property of the flexible materials. According to the experiments,the maximum pressure sensitivity of the proposed sensor can reach 218 fF/mmHg,which shows a promising application prospect in many industrial fields such as smart wearable devices as well as implantable medical pressure sensing.
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