Abstract:Flexible capacitive tactile sensors show great promise in personalized healthcare monitoring and human-machine interfaces, but their practical application is normally hindered because they rarely possess the required comprehensive performance, that is, high pressure sensitivity and fast response within a broad pressure range, high structure robustness, performance consistency, etc. This paper aims to engineer flexible capacitive pressure sensors with highly ordered porous dielectric microstructures and a 3D-printing-based fully solution-processable fabrication process. The proposed dielectric layer with uniformly distributed interior microporous can not only increase its compressibility and dynamic response within an extended pressure range but also enlarge its contact area with electrodes, contributing to a simultaneous improvement in the sensitivity, response speed, detection range, and structure robustness. Meanwhile, owing to its superior abilities in complex structure manufacturing and dimension controlling, the proposed 3D-printing-based fabrication process enables the consistent fabrication of the porous microstructure and thus guarantees device consistency. As a result, the prepared pressure sensors exhibit a high sensitivity of 0.21 kPa-1, fast response and relaxation times of 112 and 152 ms, an interface bonding strength of more than 455.2 kPa, and excellent performance consistency (≤5.47% deviation among different batches of sensors) and tunability. Encouraged by this, the pressure sensor is further integrated with a wireless readout circuit and realizes wireless wearable monitoring of various biosignals (pulse waves and heart rate) and body movements (from slight finger touch to large knee bending). Finally, the influence law of the feature parameters of the porous microstructure on device performance is established by the finite element method, paving the way for sensor optimization. This study motivates the development of flexible capacitive pressure sensors toward practical application.

Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing

Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique.

Microstructured Polyfluoroacrylate Elastomeric Dielectric Layer for Highly Stretchable Wide-Range Capacitive Pressure Sensors

A Novel Capacitive-Based Flexible Pressure Sensor Based On Stretchable Composite Electrodes And A Dielectric Elastomer With Microstructures

Flexible capacitive pressure sensor array using acoustic-assisted fabrication of microstructures as surface and dielectric layers

A Flexible Piezocapacitive Pressure Sensor with Microsphere-Array Electrodes

3D Dielectric Layer Enabled Highly Sensitive Capacitive Pressure Sensors for Wearable Electronics

Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics

Tunable Flexible Pressure Sensors using Microstructured Elastomer Geometries for Intuitive Electronics

Design and Fabrication of Flexible Capacitive Sensor With Cellular Structured Dielectric Layer via 3D Printing

An Ultra-Soft Conductive Elastomer for Multifunctional Tactile Sensors with High Range and Sensitivity.

A Flexible and Highly Sensitive Pressure Sense Electrode Based on Cotton Pulp for Wearable Electronics

Sensitive, Robust, Wide-Range, and High-Consistency Capacitive Tactile Sensors with Ordered Porous Dielectric Microstructures

Ultra-Sensitive Flexible Pressure Sensor Based on Microstructured Electrode

A New Strategy for the Fabrication of a Flexible and Highly Sensitive Capacitive Pressure Sensor

Silver nanowire-embedded PDMS with a multiscale structure for a highly sensitive and robust flexible pressure sensor.

Flexible and Transparent Capacitive Pressure Sensor with Patterned Microstructured Composite Rubber Dielectric for Wearable Touch Keyboard Application

High Sensitivity Flexible Capacitive Pressure Sensor Using Polydimethylsiloxane Elastomer Dielectric Layer Micro-Structured by 3-D Printed Mold

Microconformal electrode-dielectric integration for flexible ultrasensitive robotic tactile sensing

Highly Stretchable and Sensitive Pressure Sensor Array Based on Icicle-Shaped Liquid Metal Film Electrodes

Enhanced Piezocapacitive Effect in CaCu3Ti4O12–Polydimethylsiloxane Composited Sponge for Ultrasensitive Flexible Capacitive Sensor