Characterization of Sc/Mg Multilayers with and Without Co Barriers Layers for X-Ray Spectroscopy in the Water Window Range

Philippe Jonnard,Meiyi Wu,Karine Le Guen,Angelo Giglia,Konstantin Koshmak,Qiushi Huang,Zhe Zhang,Zhanshan Wang,Imene Esteve,Nicolas Menguy,Beatrice Doisneau
DOI: https://doi.org/10.1063/1.5128867
IF: 2.877
2019-01-01
Journal of Applied Physics
Abstract:We characterize the nanoscale periodic Sc/Mg two-layer, Sc/Mg/Co trilayers, and the Sc/Co/Mg/Co quadrilayer designed as dispersive elements for x-ray spectroscopy in the nitrogen K range (390 eV). The samples are prepared by magnetron sputtering with Mg and Sc layers being a few nanometers thick and Co layers being of subnanometric thickness. We apply nondestructive (x-ray reflectivity and x-ray fluorescence in a standing wave mode) and destructive (transmission electron microscopy) techniques to obtain a relevant description of the deposited stacks. It turns out that a strong interdiffusion takes place in the two-layer leading to poor reflective properties. Interdiffusion also occurs in the trilayers and quadrilayer but between the Sc and Co layers. These systems can be considered as periodic ScCo/Mg two-layers with well-defined layers. As a consequence, the Sc/Co/Mg/Co multilayer is found interesting to use for spectroscopy as a reflectance of 32% is expected in the N K range in the water-window range.
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